Optical microlithography XVII : 24-27 February 2004, Santa Clara, California, USA

http://www.w3.org/1999/02/22-rdf-syntax-ns#type

http://schema.org/CreativeWork
http://schema.org/Book

http://schema.org/about

http://experiment.worldcat.org/entity/work/data/1042284017#Topic/circuits_integres_masques_congres
http://id.worldcat.org/fast/1008139
http://id.loc.gov/authorities/subjects/sh85084858
http://id.loc.gov/authorities/subjects/sh85080664
http://experiment.worldcat.org/entity/work/data/1042284017#Topic/microlithographie_congres
http://id.worldcat.org/fast/975535
http://experiment.worldcat.org/entity/work/data/1042284017#Topic/fabrication_congres
http://experiment.worldcat.org/entity/work/data/1042284017#Topic/x_ray_lithography_congresses
http://experiment.worldcat.org/entity/work/data/1042284017#Topic/integrated_circuits_masks_congresses
http://id.loc.gov/authorities/subjects/sh2008114009
http://experiment.worldcat.org/entity/work/data/1042284017#Topic/microlithography_congresses
http://experiment.worldcat.org/entity/work/data/1042284017#Topic/lithographie_par_rayons_x_congres
http://id.worldcat.org/fast/1019883
http://id.loc.gov/authorities/subjects/sh85067117
http://id.loc.gov/authorities/subjects/sh85067122
http://id.loc.gov/authorities/subjects/sh85148736
http://id.loc.gov/authorities/subjects/sh2008107753
http://id.worldcat.org/fast/975575
http://id.loc.gov/authorities/subjects/sh2008104740
http://id.worldcat.org/fast/1181834
http://experiment.worldcat.org/entity/work/data/1042284017#Topic/manufacturing_processes_congresss
http://id.loc.gov/authorities/subjects/sh2008107338

http://schema.org/alternateName

"Optical microlithography 17"
"Optical microlithography 17"@en
"Optical microlithography seventeen"
"Optical microlithography seventeen"@en

http://schema.org/contributor

http://viaf.org/viaf/159263522
http://experiment.worldcat.org/entity/work/data/1042284017#Organization/society_of_photo_optical_instrumentation_engineers_u_s
http://viaf.org/viaf/139001886
http://experiment.worldcat.org/entity/work/data/1042284017#Organization/society_of_photo_optical_instrumentation_engineers_united_states
http://id.loc.gov/authorities/names/no2001094348
http://experiment.worldcat.org/entity/work/data/1042284017#Organization/society_of_photo_optical_instrumentation_engineers
http://viaf.org/viaf/138507021
http://id.loc.gov/authorities/names/n90682619
http://experiment.worldcat.org/entity/work/data/1042284017#Organization/spie_digital_library
http://experiment.worldcat.org/entity/work/data/1042284017#Organization/semiconductor_equipment_and_materials_international_mountain_view_ca
http://worldcat.org/entity/person/id/2630270651
http://experiment.worldcat.org/entity/work/data/1042284017#Meeting/conference_17_2004_02_24_27_santa_clara_calif

http://schema.org/genre

"Conference papers and proceedings"
"Conference papers and proceedings"@en

http://schema.org/name

"Optical microlithography XVII : 24-27 February 2004, Santa Clara, California, USA. Pt. 2"
"Optical microlithography XVII : 24-27 February 2004, Santa Clara, California, USA"@en
"Optical microlithography XVII : 24-27 February 2004, Santa Clara, California, USA"
"Optical microlithography XVII 24-27 February 2004, Santa Clara, California, USA"
"Optical microlithography XVII 24-27 February 2004, Santa Clara, California, USA"@en
"Optical microlithography XVII : 24 - 27 February 2004, Santa Clara, California, USA Pt. 2"
"Optical microlithography XVII 24-27 February, 2004, Santa Clara, California, USA"
"Optical microlithography XVII : 24-27 February 2004, Santa Clara, California, USA. Pt. 1"
"Optical microlithography XVII : 24 - 27 February 2004, Santa Clara, California, USA Pt. 3"
"Optical microlithography XVII : 24 - 27 February 2004, Santa Clara, California, USA Pt. 1"
"Optical microlithography XVII"@en
"Optical microlithography XVII : 24-27 February 2004, Santa Clara, California, USA. Pt. 3"
"Optical Microlithography XVII"@en

http://schema.org/workExample

http://www.worldcat.org/oclc/771360892
http://www.worldcat.org/oclc/55978404
http://www.worldcat.org/oclc/763141140
http://www.worldcat.org/oclc/771360817
http://www.worldcat.org/oclc/841343163
http://www.worldcat.org/oclc/834900475
http://www.worldcat.org/oclc/834900524
http://www.worldcat.org/oclc/492957190
http://www.worldcat.org/oclc/834900614
http://www.worldcat.org/oclc/840387426
http://www.worldcat.org/oclc/639944990
http://www.worldcat.org/oclc/636935813
http://www.worldcat.org/oclc/840387427
http://www.worldcat.org/oclc/468145808
http://www.worldcat.org/oclc/850551403
http://www.worldcat.org/oclc/746481726
http://www.worldcat.org/oclc/55858298
http://www.worldcat.org/oclc/840387869

Conference (17 2004.02.24-27 Santa Clara, Calif.)

This is a placeholder reference for a Meeting entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Event
http://www.productontology.org/id/Meeting
schema:name
"Conference (17 2004.02.24-27 Santa Clara, Calif.)"

http://experiment.worldcat.org/entity/work/data/1042284017#Meeting/conference_17_2004_02_24_27_santa_clara_calif

Semiconductor Equipment and Materials International (Mountain View, CA)

This is a placeholder reference for a Organization entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Organization
schema:name
"Semiconductor Equipment and Materials International (Mountain View, CA)"

http://experiment.worldcat.org/entity/work/data/1042284017#Organization/semiconductor_equipment_and_materials_international_mountain_view_ca

Society of Photo-Optical Instrumentation Engineers.

rdf:type
http://schema.org/Organization
schema:name
"Society of Photo-Optical Instrumentation Engineers."
"Society of Photo-optical Instrumentation Engineers"
"Society of Photo-optical Instrumentation Engineers."
"Society of photo-optical instrumentation engineers."

http://experiment.worldcat.org/entity/work/data/1042284017#Organization/society_of_photo_optical_instrumentation_engineers

Society of Photo-optical Instrumentation Engineers (U.S.)

rdf:type
http://schema.org/Organization
schema:name
"Society of Photo-optical Instrumentation Engineers (U.S.)"

http://experiment.worldcat.org/entity/work/data/1042284017#Organization/society_of_photo_optical_instrumentation_engineers_u_s

Society of Photo-optical Instrumentation Engineers (United States)

rdf:type
http://schema.org/Organization
schema:name
"Society of Photo-optical Instrumentation Engineers (United States)"

http://experiment.worldcat.org/entity/work/data/1042284017#Organization/society_of_photo_optical_instrumentation_engineers_united_states

SPIE Digital Library.

rdf:type
http://schema.org/Organization
schema:name
"SPIE Digital Library."

http://experiment.worldcat.org/entity/work/data/1042284017#Organization/spie_digital_library

Circuits intégrés Masques Congrès.

This is a placeholder reference for a Topic entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Topic
schema:name
"Circuits intégrés Masques Congrès."