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http://worldcat.org/entity/work/id/1044417581

Silicon Carbide Microelectromechanical Systems For Harsh Environments

This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product.

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  • "Silicon carbide microelectromechanical systems for harsh environments"@en
  • "Silicon carbide microelectromechanical systems for harsh environments"
  • "Silicon carbide micro electromechanical systems for harsh environments"

author

contributor

description

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  • "This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product."@en

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genre

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  • "Aufsatzsammlung"
  • "Electronic books"@en
  • "Electronic books"
  • "Livres électroniques"

name

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  • "Silicon Carbide Microelectromechanical Systems For Harsh Environments"@en
  • "Silicon carbide micro electromechanical systems for harsh environments"@en
  • "Silicon carbide micro electromechanical systems for harsh environments"
  • "Silicon carbide micro electromechanical systems : for harsh environments"
  • "Silicon carbide microelectromechanical systems for harsh environments"

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