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http://worldcat.org/entity/work/id/110428122

Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films

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http://worldcat.org/entity/person/id/2634501456

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http://worldcat.org/entity/person/id/2634501456

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"Influence of the plasma chemistry and energetics on the composition and structure evolution of sputtered oxide thin films"

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