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http://worldcat.org/entity/work/id/111313960

Kontaminationen in der Mikrostrukturierung : mit 4 Tabellen

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type

http://www.w3.org/1999/02/22-rdf-syntax-ns#type

http://schema.org/CreativeWork

about

http://schema.org/about

http://experiment.worldcat.org/entity/work/data/111313960#Topic/reinraumtechnik
http://experiment.worldcat.org/entity/work/data/111313960#Topic/kontamination
http://experiment.worldcat.org/entity/work/data/111313960#Topic/mikrosystemtechnik

creator

http://schema.org/creator

http://worldcat.org/entity/person/id/2628182580

name

http://schema.org/name

"Kontaminationen in der Mikrostrukturierung : mit 4 Tabellen"

workExample

http://schema.org/workExample

http://www.worldcat.org/oclc/163631175

Kontamination.

This is a placeholder reference for a Topic entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Topic
schema:name
"Kontamination."

http://experiment.worldcat.org/entity/work/data/111313960#Topic/kontamination

Mikrosystemtechnik.

This is a placeholder reference for a Topic entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Topic
schema:name
"Mikrosystemtechnik."

http://experiment.worldcat.org/entity/work/data/111313960#Topic/mikrosystemtechnik

Reinraumtechnik.

This is a placeholder reference for a Topic entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Topic
schema:name
"Reinraumtechnik."

http://experiment.worldcat.org/entity/work/data/111313960#Topic/reinraumtechnik

This information is contained in the WorldCat Entities dataset, which is made available under the ODC Attribution license.