"Electromechanical devices." . . . . "Kapazitiver Sensor." . . . . . . "\"Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles\"--" . . . . "Livres électroniques" . . . . . . . . "A comprehensive MEMS textbook, with worked examples and numerous homework problems."@en . . . . . . . "Electromechanics and MEMS" . "Electromechanics and MEMS"@en . . . . . . . . . . "Electronic books"@en . . "Electromechanics and microelectromechanical systems" . . "TECHNOLOGY & ENGINEERING / Electronics / Optoelectronics." . . "TECHNOLOGY & ENGINEERING Electronics Optoelectronics." . "Microsystèmes électromécaniques." . . "Sistemi microelettromeccanici." . . "Microelectromechanical systems Electronic books." . . "TECHNOLOGY & ENGINEERING Electronics Digital." . . "MEMS." . . "Systèmes microélectromécaniques." . . "Microelectromechanical systems." . . "Mikrosystemtechnik." . . "Piezoelektrischer Wandler." . . "TECHNOLOGY & ENGINEERING Electronics Microelectronics." . . "Nanoelektromechanik." . . "Dispositifs électromécaniques." . .