Investigations of perspective materials for aggressively scaled gate stacks and contact structures of MOS devices

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http://experiment.worldcat.org/entity/work/data/115195070#Topic/kristallflache
http://experiment.worldcat.org/entity/work/data/115195070#Topic/silicium_kristallflache_wolframnitride_dunne_schicht_online_publikation
http://experiment.worldcat.org/entity/work/data/115195070#Topic/dunne_schicht
http://experiment.worldcat.org/entity/work/data/115195070#Topic/mos
http://experiment.worldcat.org/entity/work/data/115195070#Topic/cobaltsilicide
http://experiment.worldcat.org/entity/work/data/115195070#Topic/silicium_kristallflache_praseodymoxide_mos
http://experiment.worldcat.org/entity/work/data/115195070#Topic/silicium_kristallflache_praseodymoxide_mos_online_publikation
http://experiment.worldcat.org/entity/work/data/115195070#Topic/praseodymoxide
http://experiment.worldcat.org/entity/work/data/115195070#Topic/wolframnitride
http://experiment.worldcat.org/entity/work/data/115195070#Topic/silicium_kristallflache_wolframnitride_dunne_schicht
http://experiment.worldcat.org/entity/work/data/115195070#Topic/silicium
http://experiment.worldcat.org/entity/work/data/115195070#Topic/silicium_kristallflache_cobaltsilicide_dunne_schicht
http://experiment.worldcat.org/entity/work/data/115195070#Topic/silicium_kristallflache_cobaltsilicide_dunne_schicht_online_publikation

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"Investigations of perspective materials for aggressively scaled gate stacks and contact structures of MOS devices"

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http://www.worldcat.org/oclc/175099955
http://www.worldcat.org/oclc/76626998
http://www.worldcat.org/oclc/638421282
http://www.worldcat.org/oclc/723195674

Cobaltsilicide.

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