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Scaling Issues and Design of MEMS

This accessible volume delivers a complete design methodology for microelectromechanical systems (MEMS). Focusing on the scaling of an autonomous micro-system, it explains the real-world problems and theoretical concepts of several different aspects inherent to the miniaturization of sensors and actuators. It reports on the analysis of dimensional scaling, the modelling, design and experimental characterization of a wide range of specific devices and applications, including:.:.; temperature microsensors based on an integrated complementary metal-oxide-semiconductor (CMOS) thermocouple;.; mecha.

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  • "Scaling issues and design of microelectromechanical systems"
  • "Scaling issues and design of microelectromechanical systems"@en

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  • "This accessible volume delivers a complete design methodology for microelectromechanical systems (MEMS). Focusing on the scaling of an autonomous micro-system, it explains the real-world problems and theoretical concepts of several different aspects inherent to the miniaturization of sensors and actuators. It reports on the analysis of dimensional scaling, the modelling, design and experimental characterization of a wide range of specific devices and applications, including:.:.; temperature microsensors based on an integrated complementary metal-oxide-semiconductor (CMOS) thermocouple;.; mecha."@en

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  • "Ressources Internet"
  • "Electronic books"@en

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  • "Scaling issues and design of microelectromechanical systems"
  • "Scaling Issues and Design of MEMS"@en
  • "Scaling Issues and Design of MEMS"
  • "Scaling issues and design of MEMS"@en
  • "Scaling issues and design of MEMS"

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