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http://worldcat.org/entity/work/id/13000728

19th Annual symposium on photomask technology

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http://id.loc.gov/authorities/subjects/sh85067122
http://id.loc.gov/authorities/subjects/sh85067117
http://id.loc.gov/authorities/subjects/sh2008107753
http://id.worldcat.org/fast/975535
http://experiment.worldcat.org/entity/work/data/13000728#Topic/microlithographie_congres
http://id.loc.gov/authorities/subjects/sh85084858
http://experiment.worldcat.org/entity/work/data/13000728#Topic/circuits_integres_masques_congres
http://id.worldcat.org/fast/1019883
http://id.loc.gov/authorities/subjects/sh2008104740

http://schema.org/alternateName

"Nineteenth Annual Symposium on Photomask Technology"@en
"Nineteenth Annual Symposium on Photomask Technology"
"Photomask technology"
"Photomask technology"@en
"Symposium on Photomask Technology"@en
"Symposium on Photomask Technology"

http://schema.org/contributor

http://experiment.worldcat.org/entity/work/data/13000728#Organization/spie_digital_library
http://worldcat.org/entity/person/id/2631216292
http://experiment.worldcat.org/entity/work/data/13000728#Meeting/symposium_on_photomask_technology_19_1999_monterey_calif
http://experiment.worldcat.org/entity/work/data/13000728#Meeting/bacus_technical_group
http://id.loc.gov/authorities/names/n92089299
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http://experiment.worldcat.org/entity/work/data/13000728#Meeting/annual_bacus_symposium_on_photomask_technology_19_1999_09_15_17_monterey_calif
http://viaf.org/viaf/130883139
http://experiment.worldcat.org/entity/work/data/13000728#Meeting/symposium_on_photomask_technology
http://experiment.worldcat.org/entity/work/data/13000728#Organization/society_of_photo_optical_instrumentation_engineers
http://viaf.org/viaf/312841713
http://experiment.worldcat.org/entity/work/data/13000728#Meeting/annual_symposium_on_photomask_technology
http://experiment.worldcat.org/entity/work/data/13000728#Meeting/annual_bacus_symposium_on_photomask_technology_19th_sept_1999_monterey
http://experiment.worldcat.org/entity/work/data/13000728#Organization/bacus_the_international_technical_group_of_spie_dedicated_to_the_advancement_of_photomask_technology
http://experiment.worldcat.org/entity/work/data/13000728#Organization/bacus_groupe_technique
http://experiment.worldcat.org/entity/work/data/13000728#Meeting/society_of_photo_optical_instrumentation_engineers

http://schema.org/creator

http://experiment.worldcat.org/entity/work/data/13000728#Meeting/bacus_symposium_on_photomask_technology_19th_1999_monterey_calif
http://viaf.org/viaf/158038241
http://experiment.worldcat.org/entity/work/data/13000728#Meeting/symposium_on_photomask_technology_19e_1999_monterey_calif
http://experiment.worldcat.org/entity/work/data/13000728#Meeting/symposium_on_photomask_technology_19th_1999_monterey_calif

http://schema.org/genre

"Conference papers and proceedings"
"Conference papers and proceedings"@en

http://schema.org/name

"19th Annual symposium on photomask technology"@en
"19th Annual Symposium on Photomask Technology"@en
"19th Annual Symposium on Photomask Technology, 15 - 17 September 1999, Monterey, California Pt. 2"
"19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California"@en
"19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California"
"19th Annual Symposium on Photomask Technology, 15-17 September 1999, Monterey, California. Pt. 1"
"19th Annual Symposium on Photomask Technology, 15 - 17 September 1999, Monterey, California Pt. 1"
"19th Annual Symposium on Photomask Technology 15-17 September 1999, Monterey, California"@en
"19th Annual Symposium on Photomask Technology 15-17 September 1999, Monterey, California"
"19th Annual Symposium on Photomask Technology, 15-17 September 1999, Monterey, California. Pt. 2"

http://schema.org/workExample

http://www.worldcat.org/oclc/771353247
http://www.worldcat.org/oclc/840363479
http://www.worldcat.org/oclc/833667941
http://www.worldcat.org/oclc/746474562
http://www.worldcat.org/oclc/849887262
http://www.worldcat.org/oclc/846542262
http://www.worldcat.org/oclc/833668257
http://www.worldcat.org/oclc/53835925
http://www.worldcat.org/oclc/632779490
http://www.worldcat.org/oclc/840362849
http://www.worldcat.org/oclc/841341911
http://www.worldcat.org/oclc/458751023
http://www.worldcat.org/oclc/43381540

Annual BACUS Symposium on Photomask Technology (19 1999.09.15-17 Monterey, Calif.)

This is a placeholder reference for a Meeting entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
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"Annual BACUS Symposium on Photomask Technology (19 1999.09.15-17 Monterey, Calif.)"

http://experiment.worldcat.org/entity/work/data/13000728#Meeting/annual_bacus_symposium_on_photomask_technology_19_1999_09_15_17_monterey_calif

Annual BACUS Symposium on Photomask Technology (19th : Sept. 1999 : Monterey,)

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"Annual BACUS Symposium on Photomask Technology (19th : Sept. 1999 : Monterey,)"

http://experiment.worldcat.org/entity/work/data/13000728#Meeting/annual_bacus_symposium_on_photomask_technology_19th_sept_1999_monterey

Annual Symposium on Photomask Technology.

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"Annual Symposium on Photomask Technology."

http://experiment.worldcat.org/entity/work/data/13000728#Meeting/annual_symposium_on_photomask_technology

BACUS Symposium on Photomask Technology (19th : 1999 : Monterey, Calif.)

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"BACUS Symposium on Photomask Technology (19th : 1999 : Monterey, Calif.)"

http://experiment.worldcat.org/entity/work/data/13000728#Meeting/bacus_symposium_on_photomask_technology_19th_1999_monterey_calif

BACUS (Technical group)

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"BACUS (Technical group)"

http://experiment.worldcat.org/entity/work/data/13000728#Meeting/bacus_technical_group

Society of Photo-optical Instrumentation Engineers

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"Society of Photo-optical Instrumentation Engineers"

http://experiment.worldcat.org/entity/work/data/13000728#Meeting/society_of_photo_optical_instrumentation_engineers

Symposium on Photomask Technology.

rdf:type
http://schema.org/Event
http://www.productontology.org/id/Meeting
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"Symposium on Photomask Technology."

http://experiment.worldcat.org/entity/work/data/13000728#Meeting/symposium_on_photomask_technology

Symposium on Photomask Technology (19 : 1999 : Monterey, Calif.)

rdf:type
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"Symposium on Photomask Technology (19 : 1999 : Monterey, Calif.)"

http://experiment.worldcat.org/entity/work/data/13000728#Meeting/symposium_on_photomask_technology_19_1999_monterey_calif

Symposium on Photomask Technology (19e : 1999 : Monterey, Calif.)

rdf:type
http://schema.org/Event
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"Symposium on Photomask Technology (19e : 1999 : Monterey, Calif.)"

http://experiment.worldcat.org/entity/work/data/13000728#Meeting/symposium_on_photomask_technology_19e_1999_monterey_calif

Symposium on Photomask Technology (19th : 1999 : Monterey, Calif.)

rdf:type
http://schema.org/Event
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"Symposium on Photomask Technology (19th : 1999 : Monterey, Calif.)"

http://experiment.worldcat.org/entity/work/data/13000728#Meeting/symposium_on_photomask_technology_19th_1999_monterey_calif

BACUS (Groupe technique)

This is a placeholder reference for a Organization entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
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"BACUS (Groupe technique)"

http://experiment.worldcat.org/entity/work/data/13000728#Organization/bacus_groupe_technique

BACUS - the International Technical Group of SPIE dedicated to the Advancement of Photomask Technology.

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"BACUS - the International Technical Group of SPIE dedicated to the Advancement of Photomask Technology."

http://experiment.worldcat.org/entity/work/data/13000728#Organization/bacus_the_international_technical_group_of_spie_dedicated_to_the_advancement_of_photomask_technology

Society of Photo-Optical Instrumentation Engineers.

rdf:type
http://schema.org/Organization
schema:name
"Society of Photo-Optical Instrumentation Engineers."
"Society of Photo-optical Instrumentation Engineers."

http://experiment.worldcat.org/entity/work/data/13000728#Organization/society_of_photo_optical_instrumentation_engineers

SPIE Digital Library.

rdf:type
http://schema.org/Organization
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"SPIE Digital Library."

http://experiment.worldcat.org/entity/work/data/13000728#Organization/spie_digital_library

Circuits intégrés Masques Congrès.

This is a placeholder reference for a Topic entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Topic
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"Circuits intégrés Masques Congrès."

http://experiment.worldcat.org/entity/work/data/13000728#Topic/circuits_integres_masques_congres

Microlithographie Congrès.

rdf:type
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"Microlithographie Congrès."