WorldCat Linked Data Explorer

Turtle N-Triple JSON-LD RDF/XML HTML Contact Us Home

http://worldcat.org/entity/work/id/1356778778

Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena

Open All Close All

type

name

http://schema.org/name

  • "Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena"@en

workExample