Integrated circuit metrology, inspection, and process control IV 5-6 March 1990, San Jose, California

http://www.w3.org/1999/02/22-rdf-syntax-ns#type

http://schema.org/Book
http://schema.org/CreativeWork

http://schema.org/about

http://id.worldcat.org/fast/975582
http://experiment.worldcat.org/entity/work/data/1362002062#Topic/messtechnik
http://experiment.worldcat.org/entity/work/data/1362002062#Topic/kongress
http://experiment.worldcat.org/entity/work/data/1362002062#Topic/circuits_integres_mesure_congres
http://experiment.worldcat.org/entity/work/data/1362002062#Topic/circuits_integres_inspection_congres
http://experiment.worldcat.org/entity/work/data/1362002062#Topic/integrierte_schaltung
http://id.worldcat.org/fast/975565
http://id.loc.gov/authorities/subjects/sh85067117

http://schema.org/contributor

http://viaf.org/viaf/167606997
http://worldcat.org/entity/person/id/2682299005
http://experiment.worldcat.org/entity/work/data/1362002062#Organization/society_of_photo_optical_instrumentation_engineers_united_states
http://experiment.worldcat.org/entity/work/data/1362002062#Organization/society_of_photo_optical_instrumentation_engineers
http://experiment.worldcat.org/entity/work/data/1362002062#Organization/society_of_photo_optical_instrumentation_engineers_u_s
http://experiment.worldcat.org/entity/work/data/1362002062#Organization/spie_digital_library
http://experiment.worldcat.org/entity/work/data/1362002062#Meeting/integrated_circuit_metrology_inspection_and_process_control

http://schema.org/genre

"Conference papers and proceedings"
"Conference papers and proceedings"@en
"San Jose (Calif., 1990)"

http://schema.org/name

"Integrated circuit metrology, inspection, and process control IV : 5-6 March 1990, San Jose, California"
"Integrated circuit metrology, inspection, and process control IV 5-6 March 1990, San Jose, California"@en
"Integrated circuit metrology, inspection, and process control IV 5-6 March 1990, San Jose, California"
"Integrated Circuit Metrology, Inspection and Process Control IV : 5-6 March 1990, San Jose, California"

http://schema.org/workExample

http://www.worldcat.org/oclc/759721659
http://www.worldcat.org/oclc/839704383
http://www.worldcat.org/oclc/849792216
http://www.worldcat.org/oclc/21961349
http://www.worldcat.org/oclc/468158975
http://www.worldcat.org/oclc/839642396
http://www.worldcat.org/oclc/63176256
http://www.worldcat.org/oclc/636027836

Integrated Circuit Metrology, Inspection, and Process Control.

This is a placeholder reference for a Meeting entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Event
http://www.productontology.org/id/Meeting
schema:name
"Integrated Circuit Metrology, Inspection, and Process Control."

http://experiment.worldcat.org/entity/work/data/1362002062#Meeting/integrated_circuit_metrology_inspection_and_process_control

Society of Photo-Optical Instrumentation Engineers.

This is a placeholder reference for a Organization entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Organization
schema:name
"Society of Photo-Optical Instrumentation Engineers."

http://experiment.worldcat.org/entity/work/data/1362002062#Organization/society_of_photo_optical_instrumentation_engineers

Society of Photo-optical Instrumentation Engineers (U.S.)

rdf:type
http://schema.org/Organization
schema:name
"Society of Photo-optical Instrumentation Engineers (U.S.)"

http://experiment.worldcat.org/entity/work/data/1362002062#Organization/society_of_photo_optical_instrumentation_engineers_u_s

Society of Photo-optical Instrumentation Engineers (United States)

rdf:type
http://schema.org/Organization
schema:name
"Society of Photo-optical Instrumentation Engineers (United States)"

http://experiment.worldcat.org/entity/work/data/1362002062#Organization/society_of_photo_optical_instrumentation_engineers_united_states

SPIE Digital Library.

rdf:type
http://schema.org/Organization
schema:name
"SPIE Digital Library."

http://experiment.worldcat.org/entity/work/data/1362002062#Organization/spie_digital_library

Circuits intégrés Inspection Congrès.

This is a placeholder reference for a Topic entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Topic
schema:name
"Circuits intégrés Inspection Congrès."

http://experiment.worldcat.org/entity/work/data/1362002062#Topic/circuits_integres_inspection_congres

Circuits intégrés Mesure Congrès.

rdf:type
http://schema.org/Topic
schema:name
"Circuits intégrés Mesure Congrès."

http://experiment.worldcat.org/entity/work/data/1362002062#Topic/circuits_integres_mesure_congres

Integrierte Schaltung.

rdf:type
http://schema.org/Topic
schema:name
"Integrierte Schaltung."

http://experiment.worldcat.org/entity/work/data/1362002062#Topic/integrierte_schaltung

Kongreß.

rdf:type
http://schema.org/Topic
schema:name
"Kongreß."

http://experiment.worldcat.org/entity/work/data/1362002062#Topic/kongress

Messtechnik.

rdf:type
http://schema.org/Topic
schema:name
"Messtechnik."