. . "Electronic books"@en . . . "This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes."@en . . "Metallic oxynitride thin films by reactive sputtering and related deposition methods processes, properties and applications"@en . . . . . . . "TECHNOLOGY & ENGINEERING Mechanical." . .