Characterization of silicon surfaces by the electron energy loss spectrum
The energy loss spectra of silicon during several stages of the cleaning treatment have been studied in a LEED apparatus. A layer of beta-SiC formed on the silicon surface is detected. The results suggest that the energy loss spectrum is sensitive to the change in chemical composition and electronic structure of the solid surface. (Author).
"The energy loss spectra of silicon during several stages of the cleaning treatment have been studied in a LEED apparatus. A layer of beta-SiC formed on the silicon surface is detected. The results suggest that the energy loss spectrum is sensitive to the change in chemical composition and electronic structure of the solid surface. (Author)."@en
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