Linked Data Explorerhttp://worldcat.org/entity/work/id/14918949
A production-compatible microelectronic test pattern for evaluating photomask misalignment : [by] T.J. Russell [and] D.A. Maxwell
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- http://id.loc.gov/authorities/subjects/sh85067122
- http://experiment.worldcat.org/entity/work/data/14918949#Topic/microelectronique
- http://experiment.worldcat.org/entity/work/data/14918949#Topic/circuits_integres_masques_essais
- http://experiment.worldcat.org/entity/work/data/14918949#Topic/semiconducteurs
- http://id.worldcat.org/fast/975578
http://schema.org/name
- "A Production-compatible microelectronic test pattern for evaluating photomask misalignment"
- "A PRODUCTION-COMPATIBLE MICROELECTRONIC TEST PATTERN FOR EVALUATING PHOTOMASK MISALIGMENT"
- "A production-compatible microelectronic test pattern for evaluating photomask misalignment : [by] T.J. Russell [and] D.A. Maxwell"@en
- "A production-compatible microelectronic test pattern for evaluating photomask misalignment"
- "A production-compatible microelectronic test pattern for evaluating photomask misalignment"@en