Linked Data Explorerhttp://worldcat.org/entity/work/id/17063496
Developments in semiconductor microlithography IV April 23-24, 1979, San Jose, California
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- http://id.loc.gov/authorities/subjects/sh85134862
- http://id.worldcat.org/fast/1019883
- http://id.worldcat.org/fast/1019757
- http://id.loc.gov/authorities/subjects/sh2008111509
- http://id.loc.gov/authorities/subjects/sh2008107753
- http://id.worldcat.org/fast/1112198
- http://id.worldcat.org/fast/1150057
- http://id.loc.gov/authorities/subjects/sh85101379
- http://id.worldcat.org/fast/1062032
- http://id.loc.gov/authorities/subjects/sh2008107752
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- "Conference papers and proceedings"
- "Conference papers and proceedings"@en