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Proceedings of the Symposium Silicon Nitride Thin Insulating Films : [held May 11 - 13, 1983, in San Francisco, Calif.]
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http://schema.org/alternateName
- "Silicon nitride thin insulating films"
http://schema.org/contributor
- http://id.loc.gov/authorities/names/n79124668
- http://worldcat.org/entity/person/id/2639434599
- http://viaf.org/viaf/138976864
- http://experiment.worldcat.org/entity/work/data/1809014810#Organization/electrochemical_society_dielectrics_and_insulating_division
- http://viaf.org/viaf/150693656
- http://id.loc.gov/authorities/names/n79124670
- http://worldcat.org/entity/person/id/2637798152
http://schema.org/creator
- http://id.loc.gov/authorities/names/n83134895
- http://experiment.worldcat.org/entity/work/data/1809014810#Organization/symposium_on_silicon_nitride_thin_insulating_films_<_1983_san_francisco_calif_>
- http://viaf.org/viaf/263785227
- http://experiment.worldcat.org/entity/work/data/1809014810#Meeting/symposium_on_silicon_nitride_thin_insulating_films_1983_san_francisco_calif
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- "Conference papers and proceedings"
http://schema.org/name
- "Proceedings of the Symposium Silicon Nitride Thin Insulating Films : [held May 11 - 13, 1983, in San Francisco, Calif.]"
- "Proceedings of the Symposium on Silicon Nitride Thin Insulating Films"