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Results of the Monte Carlo calculation of one- and two-dimensional distributions of particles and damage ion implanted dopants in silicon

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  • "Results of the Monte Carlo calculation of one- and two-dimensional distributions of particles and damage ion implanted dopants in silicon"@en
  • "Results of the Monte Carlo Calculation of One- and Two-Dimensional Distributions of Particles and Damage : Ion Implanted Dopants in Silicon"
  • "Results of the Monte Carlo calculation of one- and two-dimensional distributions of particles and damage : ion implanted dopants in silicon"
  • "Results of the Monte Carlo Calculation of one- and two-dimensional distributions of particles and damage ion implanted dopants in silicon"