"Semiconductor wafers." . . "Semiconducteurs." . . "United States. Division of Electric Energy Systems." . . "Center for Electronics and Electrical Engineering (U.S.). Electron Devices Division." . . "A wafer chuck for use between - 196 and 350\" C" . . . . . . . "A wafer chuck for use between -196 and 350C" . . "A wafer chuck for use between -196 and 350°C" . . . "A wafer chuck for use between -196 and 350°C"@en . . . . . . . . . . . . . . . . . . . "A Wafer Chuck for use between -196 and 350 degrees c"@en . . "A Wafer chuck for use between 196 and 350° C" . . . . "A wafer chuck for use between -196 and 350 C : [by] R.Y. Koyama and M.G. Buehler"@en . . . "United States. Defense Advanced Research Projects Agency." . . "Microélectronique." . .