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http://worldcat.org/entity/work/id/1863773205

Model of plasma immersion ion implantation for voltage pulses with finite rise- and fall-times

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http://www.w3.org/1999/02/22-rdf-syntax-ns#type

http://schema.org/CreativeWork

contributor

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http://worldcat.org/entity/person/id/2631687547

creator

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http://worldcat.org/entity/person/id/2629011779

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"Model of plasma immersion ion implantation for voltage pulses with finite rise- and fall-times"

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http://www.worldcat.org/oclc/44005991