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CCD Image Sensors in Deep-Ultraviolet Degradation Behavior and Damage Mechanisms

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the.

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  • "Charge-coupled device image sensors in deep-ultraviolet"

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  • "As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the."@en

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  • "Electronic books"@en
  • "Electronic books"

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  • "CCD Image Sensors in Deep-Ultraviolet Degradation Behavior and Damage Mechanisms"@en
  • "CCD Image Sensors in Deep-Ultraviolet Degradation Behavior and Damage Mechanisms"
  • "CCD Image Sensors in Deep-Ultraviolet : Degradation Behavior and Damage Mechanisms"
  • "CCD image sensors in deep-ultraviolet degradation behavior and damage mechanisms"@en
  • "CCD image sensors in deep-ultraviolet degradation behavior and damage mechanisms"
  • "CCD Image Sensors in Deep-Ultraviolet"
  • "CCD image sensors in deep-ultraviolet : degradation behavior and damage mechanisms"

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