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Micro and nano fabrication : tools and processes
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
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http://schema.org/about
- http://experiment.worldcat.org/entity/work/data/2034183078#Topic/mikrosystemtechnik
- http://experiment.worldcat.org/entity/work/data/2034183078#Topic/engineering
- http://experiment.worldcat.org/entity/work/data/2034183078#Topic/nanotechnologie
- http://experiment.worldcat.org/entity/work/data/2034183078#Topic/structural_control_engineering
- http://experiment.worldcat.org/entity/work/data/2034183078#Topic/nanoelektromechanik
- http://experiment.worldcat.org/entity/work/data/2034183078#Topic/microelectromechanical_systems
- http://experiment.worldcat.org/entity/work/data/2034183078#Topic/machinery
- http://experiment.worldcat.org/entity/work/data/2034183078#Topic/controle_des_structures_ingenierie
- http://experiment.worldcat.org/entity/work/data/2034183078#Topic/operating_procedures_materials_treatment
- http://experiment.worldcat.org/entity/work/data/2034183078#Topic/microelectromechanical_systems_design_and_construction
- http://experiment.worldcat.org/entity/work/data/2034183078#Topic/dunnschichttechnik
- http://experiment.worldcat.org/entity/work/data/2034183078#Topic/nanotechnology_and_microengineering
- http://experiment.worldcat.org/entity/work/data/2034183078#Topic/machines
- http://experiment.worldcat.org/entity/work/data/2034183078#Topic/microfabrication
- http://experiment.worldcat.org/entity/work/data/2034183078#Topic/manufacturing_machines_tools
- http://experiment.worldcat.org/entity/work/data/2034183078#Topic/nanoelectromechanical_systems_design_and_construction
- http://experiment.worldcat.org/entity/work/data/2034183078#Topic/mikrofertigung
- http://experiment.worldcat.org/entity/work/data/2034183078#Topic/mems
- http://experiment.worldcat.org/entity/work/data/2034183078#Topic/ingenierie
http://schema.org/description
- "For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control."@en
- "For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control."
http://schema.org/genre
- "Electronic books"@en
- "Ressources Internet"
http://schema.org/name
- "Micro and nano fabrication : tools and processes"
- "Micro and nano fabrication : tools and processes"@en
- "Micro and Nano Fabrication - Tools and Processes"
- "Micro and Nano Fabrication : Tools and Processes"
- "Micro and nano fabrication - tools and processes"
- "Micro and Nano Fabrication Tools and Processes"