Linked Data Explorerhttp://worldcat.org/entity/work/id/20885392
Fundamentals of microfabrication
This reference work discusses topics such as: lithography; pattern transfer; wet and dry bulk micromachining; surface micromachining; and LIGA. Alternative micromachining technologies are described and electronics used with micromachined devices are also e.
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http://schema.org/about
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http://schema.org/description
- "This reference work discusses topics such as: lithography; pattern transfer; wet and dry bulk micromachining; surface micromachining; and LIGA. Alternative micromachining technologies are described and electronics used with micromachined devices are also e."@en
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- "Matériel didactique"
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- "Fundamentals of microfabrication : The science of miniaturization"
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