http://worldcat.org/entity/work/id/2243648994

Micromachining

Micromachining comprises a growing collection of manufacturing technologies that are being used to create micro-electromechanical systems (MEMS) and new microfluidic and micro-optic devices. This micromachining program presents case studies of companies and research institutions using various micromachining methods, including: EIGERlab, a facility supporting the development of miniaturized machine tools for high-accuracy, sub-millimeter micro-milling, cutting and drilling operations. Translume, where lasers and etching are used to create light- and fluid-transmitting micro-channels within glass. Integrated sensing systems, where semiconductor manufacturing techniques are used to produce fluid-handling components on silicon wafers. Microfabrica Inc., where complex, three-dimensional MEMS devices are built using a multi-layer technology inspired by rapid prototyping.

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