Linked Data Explorerhttp://worldcat.org/entity/work/id/22649650
Optical Microlithography and Metrology for Microcircuit Fabrication
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http://schema.org/about
- http://experiment.worldcat.org/entity/work/data/22649650#Topic/design
- http://id.loc.gov/authorities/subjects/sh85067117
- http://id.loc.gov/authorities/subjects/sh2008104738
- http://id.worldcat.org/fast/975535
- http://experiment.worldcat.org/entity/work/data/22649650#Topic/optics
- http://experiment.worldcat.org/entity/work/data/22649650#Topic/circuits
- http://experiment.worldcat.org/entity/work/data/22649650#Topic/microelectronics
- http://experiment.worldcat.org/entity/work/data/22649650#Topic/conferences
- http://experiment.worldcat.org/entity/work/data/22649650#Topic/integrated_circuits
- http://id.loc.gov/authorities/subjects/sh85084858
- http://id.worldcat.org/fast/975545
- http://id.loc.gov/authorities/subjects/sh2008107753
- http://experiment.worldcat.org/entity/work/data/22649650#Topic/lithography
- http://id.worldcat.org/fast/1019883
http://schema.org/contributor
- http://worldcat.org/entity/person/id/2642362509
- http://experiment.worldcat.org/entity/work/data/22649650#Meeting/eco2_1989_paris_france
- http://viaf.org/viaf/312739189
- http://id.loc.gov/authorities/names/n50054575
- http://experiment.worldcat.org/entity/work/data/22649650#Organization/eco
- http://id.loc.gov/authorities/names/n88212131
- http://worldcat.org/entity/person/id/2635609290
- http://viaf.org/viaf/167606997
- http://id.loc.gov/authorities/names/n79046065
- http://viaf.org/viaf/150827271
- http://worldcat.org/entity/person/id/2693007845
- http://experiment.worldcat.org/entity/work/data/22649650#Organization/europtica_european_federation_for_applied_optics
- http://worldcat.org/entity/person/id/2642643709
- http://viaf.org/viaf/155675637
- http://experiment.worldcat.org/entity/work/data/22649650#Meeting/european_congress_on_optics_eco2_2nd_apr_1989_paris
http://schema.org/genre
- "Conference papers and proceedings"@en
http://schema.org/name
- "Optical Microlithography and Metrology for Microcircuit Fabrication"@en
- "Optical microlithography and metrology for microcircuit fabrication : ECO 2, 27-28 April 1989, Paris, France"
- "Optical microlithography and metrology for microcircuit fabrication 27-28 April 1989, Paris, France"@en
- "Optical microlithography and metrology for microcircuit fabrication : ECO2, 27-28 April 1989, Paris, France"
- "Optical microlithography and metrology for microcircuit fabrication : Conference : International congress on optical science and engineering : Papers"@en
- "Optical microlithography and metrology for microcircuit fabrication : 27-28 April 1989, Paris, France"@en