Microcircuit Engineering 89 proceedings of the International Conference on Microlithography, September 26-28, 1989, Cambridge, England

http://www.w3.org/1999/02/22-rdf-syntax-ns#type

http://schema.org/Book
http://schema.org/CreativeWork

http://schema.org/about

http://experiment.worldcat.org/entity/work/data/24006589#Topic/lithographie_par_rayons_x_congres
http://experiment.worldcat.org/entity/work/data/24006589#Topic/lithographie_par_faisceau_d_ions_congres
http://id.loc.gov/authorities/subjects/sh2008107752
http://id.worldcat.org/fast/1019757
http://experiment.worldcat.org/entity/work/data/24006589#Topic/microelectronics
http://experiment.worldcat.org/entity/work/data/24006589#Topic/lithography
http://experiment.worldcat.org/entity/work/data/24006589#Topic/microlithographie_congres
http://experiment.worldcat.org/entity/work/data/24006589#Topic/eletronica_digital
http://id.worldcat.org/fast/1019883
http://id.loc.gov/authorities/subjects/sh85084822
http://experiment.worldcat.org/entity/work/data/24006589#Topic/lithographie_par_faisceau_d_electrons_congres
http://experiment.worldcat.org/entity/work/data/24006589#Topic/conferences
http://id.loc.gov/authorities/subjects/sh2008107753
http://experiment.worldcat.org/entity/work/data/24006589#Topic/integrated_circuits
http://id.loc.gov/authorities/subjects/sh85084858

http://schema.org/contributor

http://experiment.worldcat.org/entity/work/data/24006589#Meeting/colloque_international_sur_la_microlithographie_15_1989_cambridge_gb
http://experiment.worldcat.org/entity/work/data/24006589#Meeting/microcircuit_engineering_15_1989_09_26_28_cambridge_england
http://worldcat.org/entity/person/id/2636027378
http://experiment.worldcat.org/entity/work/data/24006589#Meeting/microcircuit_engineering_89_15th_1989_cambridge_england

http://schema.org/creator

http://experiment.worldcat.org/entity/work/data/24006589#Meeting/microcircuit_engineering_89_1989_cambridge_england
http://experiment.worldcat.org/entity/work/data/24006589#Meeting/microcircuit_engineering_15th_1989_cambridge_england

http://schema.org/genre

"Conference papers and proceedings"@en
"Conference papers and proceedings"

http://schema.org/name

"Microcircuit Engineering 89 : proceedings of the International Conference on Microlithography"
"Microcircuit Engineering 89 proceedings of the International Conference on Microlithography, September 26-28, 1989, Cambridge, England"@en
"Microcircuit Engineering 89 : proceedings of the International Conference on Microlithography, September 26-28, 1989, Cambridge, England"@en
"Microcircuit Engineering 89 : proceedings of the International Conference on Microlithography, September 26-28, 1989, Cambridge, England"
"Microcircuit engineering 89 : proceedings of the [15th] International Conference on Microlithography, September 26-28, 1989, Cambrigde, England"

http://schema.org/workExample

http://www.worldcat.org/oclc/256046935
http://www.worldcat.org/oclc/756230969
http://www.worldcat.org/oclc/23080133
http://www.worldcat.org/oclc/489857221
http://www.worldcat.org/oclc/623148018

Colloque international sur la microlithographie (15 ; 1989 ; Cambridge, GB)

This is a placeholder reference for a Meeting entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Event
http://www.productontology.org/id/Meeting
schema:name
"Colloque international sur la microlithographie (15 ; 1989 ; Cambridge, GB)"

http://experiment.worldcat.org/entity/work/data/24006589#Meeting/colloque_international_sur_la_microlithographie_15_1989_cambridge_gb

Microcircuit Engineering (15 : 1989.09.26-28 : Cambridge/England)

rdf:type
http://schema.org/Event
http://www.productontology.org/id/Meeting
schema:name
"Microcircuit Engineering (15 : 1989.09.26-28 : Cambridge/England)"

http://experiment.worldcat.org/entity/work/data/24006589#Meeting/microcircuit_engineering_15_1989_09_26_28_cambridge_england

Microcircuit Engineering (15th : 1989 : Cambridge, England)

rdf:type
http://schema.org/Event
http://www.productontology.org/id/Meeting
schema:name
"Microcircuit Engineering (15th : 1989 : Cambridge, England)"

http://experiment.worldcat.org/entity/work/data/24006589#Meeting/microcircuit_engineering_15th_1989_cambridge_england

Microcircuit Engineering 89 (15th : 1989 : Cambridge, England)

rdf:type
http://schema.org/Event
http://www.productontology.org/id/Meeting
schema:name
"Microcircuit Engineering 89 (15th : 1989 : Cambridge, England)"

http://experiment.worldcat.org/entity/work/data/24006589#Meeting/microcircuit_engineering_89_15th_1989_cambridge_england

Microcircuit Engineering 89 (1989 : Cambridge, England)

rdf:type
http://schema.org/Event
http://www.productontology.org/id/Meeting
schema:name
"Microcircuit Engineering 89 (1989 : Cambridge, England)"

http://experiment.worldcat.org/entity/work/data/24006589#Meeting/microcircuit_engineering_89_1989_cambridge_england

CONFERENCES.

This is a placeholder reference for a Topic entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Topic
schema:name
"CONFERENCES."