Linked Data Explorerhttp://worldcat.org/entity/work/id/24164598
Proceedings of the Eighth Symposium on Plasma Processing : [held in Montreal, Canada, May 6 - 11, 1990]
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- http://id.worldcat.org/fast/1066327
- http://experiment.worldcat.org/entity/work/data/24164598#Topic/gravure_par_plasma
- http://experiment.worldcat.org/entity/work/data/24164598#Topic/semiconducteurs
- http://id.loc.gov/authorities/subjects/sh2010112588
- http://id.loc.gov/authorities/subjects/sh2010106195
- http://experiment.worldcat.org/entity/work/data/24164598#Topic/technique_des_plasmas
- http://id.worldcat.org/fast/1112219
http://schema.org/alternateName
- "Plasma processing"
http://schema.org/contributor
- http://worldcat.org/entity/person/id/2630180251
- http://id.loc.gov/authorities/names/n79124670
- http://id.loc.gov/authorities/names/n91001217
- http://viaf.org/viaf/140364281
- http://experiment.worldcat.org/entity/work/data/24164598#Meeting/symposium_on_plasma_processing
- http://viaf.org/viaf/150693656
- http://worldcat.org/entity/person/id/2642862525
- http://experiment.worldcat.org/entity/work/data/24164598#Organization/electrochemical_society_u_s_dielectric_science_and_technology_division
http://schema.org/genre
- "Conference papers and proceedings"
http://schema.org/name
- "Proceedings of the Eighth Symposium on Plasma Processing : [held in Montreal, Canada, May 6 - 11, 1990]"
- "Proceedings of the Eighth Symposium on Plasma Processing"