Linked Data Explorerhttp://worldcat.org/entity/work/id/2517117977
Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena
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http://schema.org/about
- http://experiment.worldcat.org/entity/work/data/2517117977#Topic/microelectronics
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- http://experiment.worldcat.org/entity/work/data/2517117977#Topic/mat_♭riaux_nanocristallins_p_♭riodiques
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- http://id.loc.gov/authorities/subjects/sh2010101675
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- http://experiment.worldcat.org/entity/work/data/2517117977#Topic/microelectronica_publicaciones_periodicas
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- http://experiment.worldcat.org/entity/work/data/2517117977#Topic/nanoparticules_mesure_periodiques
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- http://experiment.worldcat.org/entity/work/data/2517117977#Topic/vide_technologie_p_♭riodiques
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- http://experiment.worldcat.org/entity/work/data/2517117977#Topic/nanostructured_materials
- http://experiment.worldcat.org/entity/work/data/2517117977#Topic/microelectronique_periodiques
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http://schema.org/alternateName
- "JVST B : Journal of vacuum science & technology B. Nanotechnology & microelectronics : materials, processing, measurement, & phenomena"
- "Microelectronics and nanometer structures"
- "Microelectronics and nanometer structures"@en
- "Journal of vacuum science & technology B. Nanotechnology & microelectronics : materials, processing, measurement, & phenomena"
- "JVST B"
- "JVST B"@en
- "JVST B, Microelectronics and nanometer structures"@en
- "Nanotechnology & microelectronics"@en
- "Microelectronics processing and phenomena"@en
- "Journal of vacuum science & technology"
- "Journal of vacuum science & technology"@en
- "Nanotechnolgy & microelectronics"@en
- "Journal of vacuum science and technology"@en
- "$I Issues for 2003- have issue PDF table of contents title: $a Journal of vacuum science & technology"@en
- "Journal of vacuum science and technology"
http://schema.org/contributor
- http://id.loc.gov/authorities/names/n79078128
- http://viaf.org/viaf/126656706
- http://id.loc.gov/authorities/names/n79055352
- http://experiment.worldcat.org/entity/work/data/2517117977#Organization/american_institute_of_physics
- http://experiment.worldcat.org/entity/work/data/2517117977#Organization/american_vacuum_society
- http://worldcat.org/entity/person/id/2694766085
- http://viaf.org/viaf/150484606
http://schema.org/name
- "Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena"
- "Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena"@en
- "Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement, and phenomena : an official journal of the American Vacuum Society"@en
- "Journal of vacuum science & technology. B, Microelectronics and nanometer structures (Online)"@en
- "Journal of vacuum science & technology. B, MICROELECTRONICS AND NANOMETER STRUCTURES"
- "Journal of vacuum science & technology. B. Microelectronics and nanometer structures : processing, measurement, and phenomena"
- "Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement and phenomena"
- "Journal of vacuum science & technology. B, Microelectronics and nanometer structures, processing, measurement, and phenomena"
- "Journal of vacuum science & technology. B, Microelectronics and nanometer structures : An official journal of the American Vacuum Society"
- "Journal of vacuum science & technology. B, Microelectronics and nanometer structures"@en
- "Journal of vacuum science & technology. B, Microelectronics and nanometer structures"
- "Journal of vacuum science & technology B, Microelectronics and nanometer structures"
- "Journal of vacuum science & technology. B, Microelectronics and nanometer structures : processing, measurement and phenomena : an official journal of the American Vacuum Society"
- "Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement, and phenomena"@en
- "Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement, and phenomena : an official journal of the American Vacuum Society"@en
- "Journal of vacuum science & technology processing, measurement, and phenomena . B , Microelectronics and nanometer structures"
- "Journal of vacuum science and technology : an official journal of the American Vacuum Society. B, Microelectronics and nanometer structures"@en
- "Journal of vacuum science [and] technology. B, Microelectronics and nanometer structures"
http://schema.org/workExample
- http://www.worldcat.org/oclc/476648377
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