. . . . . . . "Fabrication of lightweight Si/SiC LIDAR mirrors" . "Fabrication of lightweight Si/SiC LIDAR mirrors"@en . . . . . . . . . . . . . . . . "Fabrication of lightweight Si, SiC LIDAR mirrors" . . . . "Silicon." . . "Silcon carbides." . . "Mirrors." . . . . "Vapor deposition." . . "Optical radar." . .