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<http://experiment.worldcat.org/entity/work/data/28744343#Topic/oberflachenbehandlung> <http://schema.org/name> "Oberflächenbehandlung." .
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<http://experiment.worldcat.org/entity/work/data/28744343#Topic/dunnschichttechnik> <http://schema.org/name> "Dünnschichttechnik." .
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<http://experiment.worldcat.org/entity/work/data/28744343#Topic/atzen> <http://schema.org/name> "Ätzen." .
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<http://experiment.worldcat.org/entity/work/data/28744343#Topic/semiconducteurs_congres> <http://schema.org/name> "Semiconducteurs Congrès." .
<http://experiment.worldcat.org/entity/work/data/28744343#Topic/semiconducteurs_congres> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://schema.org/Topic> .
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<http://experiment.worldcat.org/entity/work/data/28744343#Topic/halbleiter> <http://schema.org/name> "Halbleiter." .
<http://experiment.worldcat.org/entity/work/data/28744343#Topic/halbleiter> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://schema.org/Topic> .
<http://experiment.worldcat.org/entity/work/data/28744343#Meeting/symposium_k_materials_modifications_by_energetic_atoms_and_ions_1992_san_francisco_calif> <http://schema.org/name> "Symposium K, \"Materials Modifications by Energetic Atoms and Ions\" (1992 : San Francisco, Calif.)" .
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