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http://worldcat.org/entity/work/id/3122635

Methods and materials in microelectronic technology

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http://schema.org/genre

  • "Electronic books"
  • "Ionenlithographie"
  • "Kongreß"
  • "Kongress"
  • "Neuenahr-Ahrweiler (1982)"
  • "Conference papers and proceedings"@en
  • "Conference papers and proceedings"

http://schema.org/name

  • "Methods and materials in microelectronic technology : [proceedings of the International Symposium on Methods and Materials in Microelectronic Technology, held September 29 - October 1, 1982, in Bad Neuenahr, Federal Republic of Germany]"
  • "Methods and materials in microelectronic technology : [proceedings of the International Symposium on Methods and Materials in Microelectronic Technology held September 29-October 1, 1982 in Bad Neuenahr, Federal Republic of Germany]"
  • "Methods and Materials in Microelectronic Technology"
  • "Methods and materials in microelectronic technology : Proc. of the International Symposium on Methods and Materials in Microelectronic Technology, held September 29 - October 1, 1982 in Bad Neuenahr, Federal Republic of Germany"
  • "Methods and materials in microelectronic technology : [proceedings of the International Symposium on..., held September 29- October 1 , 1982, in Bad Neuenahr-Ahrweiler, Federal Republic of Germany]"
  • "Methods and materials in microelectronic technology"
  • "Methods and materials in microelectronic technology"@en
  • "Methods and materials in microelectronic technology : [proceedings of the Internat. Symposium on Methods and Materials in Microelectronic Technology, held Sept. 29-Oct. 1., 1982, in Bad Neuenahr]"