"International Symposium on Methods and Materials in Microelectronic Technology (1982 ; Bad Neuenahr, Germany)" . . . "International Symposium on Methods and Materials in Microelectronic Technology (1982 : Bad Neuenahr-Ahrweiler, Allemagne)" . . . "Lithographie par rayons X Congrès." . . "Microélectronique." . . "Mikroelektronik." . . "International Symposium on Methods and Materials in Microelectronic Technology (1982 : Bad Neuenahr Ahrweiler)" . . . "International Symposium on Methods and Materials in Microelectronic Technology (1982 : Bad Neuenahr-Ahrweiler)" . "Lithographie par faisceau d'ions Congrès." . . "Integrierte Schaltung." . . "Disseny" . . "Röntgenlithographie." . . "Construcció" . . "Technologie." . . "Fotolithografie (Halbleitertechnologie)" . . "Microlithographie Congrès." . . "Lithographie par faisceau d'électrons Congrès." . . "Photolithographie Congrès." . . . . . . . . "Methods and materials in microelectronic technology : [proceedings of the International Symposium on Methods and Materials in Microelectronic Technology, held September 29 - October 1, 1982, in Bad Neuenahr, Federal Republic of Germany]" . . "Methods and materials in microelectronic technology : [proceedings of the International Symposium on Methods and Materials in Microelectronic Technology held September 29-October 1, 1982 in Bad Neuenahr, Federal Republic of Germany]" . . . "Methods and Materials in Microelectronic Technology" . . . . . . . . . . . . . "Electronic books" . . . "Ionenlithographie" . . . . . . . . . . . "Kongreß" . . . . "Methods and materials in microelectronic technology : Proc. of the International Symposium on Methods and Materials in Microelectronic Technology, held September 29 - October 1, 1982 in Bad Neuenahr, Federal Republic of Germany" . "Methods and materials in microelectronic technology : [proceedings of the International Symposium on..., held September 29- October 1 , 1982, in Bad Neuenahr-Ahrweiler, Federal Republic of Germany]" . . . . . . "Kongress" . . . . . . . "Methods and materials in microelectronic technology"@en . "Methods and materials in microelectronic technology" . . . . "Neuenahr-Ahrweiler (1982)" . . . "Methods and materials in microelectronic technology : [proceedings of the Internat. Symposium on Methods and Materials in Microelectronic Technology, held Sept. 29-Oct. 1., 1982, in Bad Neuenahr]" . . . "Conference papers and proceedings" . "Conference papers and proceedings"@en . . . . . . . "Halbleitertechnologie." . . "Circuits intégrés." . . "International Symposium on Methods and Materials in Microelectronic Technology (1982 : Bad Neuenahr-Ahrweiler, Germany)" . . . "Circuits integrats" . . "Technik." . . "Congressos i conferències" . . "Photolithographie (Halbleitertechnologie)" . . "Röntgenlithografie." . . "Circuits intégrés à très grande échelle Élaboration Congrès." . . "VLSI." . . "Kongress." . . "Kongreß." .