Linked Data Explorerhttp://worldcat.org/entity/work/id/33147189
Plasma sources for thin film deposition and etching
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http://schema.org/about
- http://experiment.worldcat.org/entity/work/data/33147189#Topic/projection_au_plasma
- http://experiment.worldcat.org/entity/work/data/33147189#Topic/plasmaanlage
- http://experiment.worldcat.org/entity/work/data/33147189#Topic/plasmas_technique_des
- http://experiment.worldcat.org/entity/work/data/33147189#Topic/atzen
- http://id.worldcat.org/fast/1150018
- http://id.loc.gov/authorities/subjects/sh85134864
- http://experiment.worldcat.org/entity/work/data/33147189#Topic/dunne_schicht
- http://experiment.worldcat.org/entity/work/data/33147189#Topic/gravure_par_plasma
- http://experiment.worldcat.org/entity/work/data/33147189#Topic/pel_licules_fines
- http://experiment.worldcat.org/entity/work/data/33147189#Topic/technique_des_plasmas
- http://experiment.worldcat.org/entity/work/data/33147189#Topic/couches_minces
- http://experiment.worldcat.org/entity/work/data/33147189#Topic/thin_films
- http://experiment.worldcat.org/entity/work/data/33147189#Topic/herstellung
http://schema.org/genre
- "Electronic books"@en
http://schema.org/name
- "Plasma sources for thin film deposition and etching"
- "Plasma sources for thin film deposition and etching"@en