Materials science of microelectromechanical systems (MEMS) devices

http://www.w3.org/1999/02/22-rdf-syntax-ns#type

http://schema.org/CreativeWork
http://schema.org/Book

http://schema.org/about

http://experiment.worldcat.org/entity/work/data/341649776#Topic/kongress
http://id.loc.gov/authorities/subjects/sh2008107748
http://id.worldcat.org/fast/1019771
http://id.loc.gov/authorities/subjects/sh97007351
http://id.worldcat.org/fast/1019745
http://experiment.worldcat.org/entity/work/data/341649776#Topic/microelectronica_materials_congressos
http://experiment.worldcat.org/entity/work/data/341649776#Topic/mikromechanik
http://experiment.worldcat.org/entity/work/data/341649776#Topic/microelectronica
http://experiment.worldcat.org/entity/work/data/341649776#Topic/systemes_microelectromecaniques_congres
http://experiment.worldcat.org/entity/work/data/341649776#Topic/sistemes_microelectromecanics
http://id.loc.gov/authorities/subjects/sh85084822
http://id.loc.gov/authorities/subjects/sh2008107190
http://experiment.worldcat.org/entity/work/data/341649776#Topic/mikroelektronik
http://experiment.worldcat.org/entity/work/data/341649776#Topic/werkstoff
http://experiment.worldcat.org/entity/work/data/341649776#Topic/microelectronique_materiaux_congres

http://schema.org/contributor

http://experiment.worldcat.org/entity/work/data/341649776#Meeting/symposium_aa_materials_science_of_microelectromechanical_systems_mems_devices_1998_12_01_02_boston_mass
http://experiment.worldcat.org/entity/work/data/341649776#Meeting/mrs_fall_meeting_1998_1998_12_01_02_boston_mass
http://worldcat.org/entity/person/id/2636952739
http://experiment.worldcat.org/entity/work/data/341649776#Organization/materials_research_society_fall_meeting_symposium_aa
http://worldcat.org/entity/person/id/2636590054

http://schema.org/genre

"Boston (Mass., 1998)"
"Conference papers and proceedings"@en
"Conference papers and proceedings"
"Conference proceedings"

http://schema.org/name

"Materials science of microelectromechanical systems, MEMS, devices symposium held december 1-2, 1998, Massachusetts, U.S.A"
"Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1 - , 1998, Boston, Massachusetts, U.S.A"
"Materials science of microelectromechanical systems (MEMS) devices : symposium held December 1 - 2, 1998, Boston, Massachusetts, U.S.A"
"Materials science of microelectromechanical systems (MEMS) devices : symposium held december 1-2, 1998, Boston, Massachusetts, USA"
"Materials science of microelectromechanical systems (MEMS) devices"@en
"Materials science of microelectromechanical systems (MEMS) devices"
"Materials science of microelectromechanical systems (mems) devices : symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A"

http://schema.org/workExample

http://www.worldcat.org/oclc/300373049
http://www.worldcat.org/oclc/491008114
http://www.worldcat.org/oclc/632894506
http://www.worldcat.org/oclc/319207655
http://www.worldcat.org/oclc/42649737
http://www.worldcat.org/oclc/807459575
http://www.worldcat.org/oclc/247822077

MRS Fall Meeting (1998 1998.12.01-02 Boston, Mass.)

This is a placeholder reference for a Meeting entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Event
http://www.productontology.org/id/Meeting
schema:name
"MRS Fall Meeting (1998 1998.12.01-02 Boston, Mass.)"

http://experiment.worldcat.org/entity/work/data/341649776#Meeting/mrs_fall_meeting_1998_1998_12_01_02_boston_mass

Symposium AA, "Materials Science of Microelectromechanical Systems (MEMS) Devices" (1998.12.01-02 Boston, Mass.)

rdf:type
http://schema.org/Event
http://www.productontology.org/id/Meeting
schema:name
"Symposium AA, "Materials Science of Microelectromechanical Systems (MEMS) Devices" (1998.12.01-02 Boston, Mass.)"

http://experiment.worldcat.org/entity/work/data/341649776#Meeting/symposium_aa_materials_science_of_microelectromechanical_systems_mems_devices_1998_12_01_02_boston_mass

Materials Research Society. Fall Meeting Symposium AA.

This is a placeholder reference for a Organization entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Organization
schema:name
"Materials Research Society. Fall Meeting Symposium AA."

http://experiment.worldcat.org/entity/work/data/341649776#Organization/materials_research_society_fall_meeting_symposium_aa

Kongress.

This is a placeholder reference for a Topic entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Topic
schema:name
"Kongress."