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http://worldcat.org/entity/work/id/364297308

Soft X-Rays and Extreme Ultraviolet Radiation Principles and Applications

This self-contained, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The book will be of great interest to graduate students, researchers and practising engineers.

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  • "Ben shu jie shao ruanXshe xian yu ji zi wai fu she de ji ben te zheng, yan jiu ta men zai ban dao ti xin pian zhi bei de ji zi wai guang ke he sheng wu yang pin de ruanXshe xian xian wei deng duo ge ling yu de guang fan ying yong."
  • "This self-contained, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The book will be of great interest to graduate students, researchers and practising engineers."@en

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  • "Online-Publikation"
  • "Lehrbuch"
  • "Electronic books"
  • "Electronic books"@en

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  • "Soft X-Rays and Extreme Ultraviolet Radiation Principles and Applications"@en
  • "Soft X-Rays and Extreme Ultraviolet Radiation Principles and Applications"
  • "Soft x-rays and extreme ultraviolet radiation principles and applications"
  • "Soft x-rays and extreme ultraviolet radiation principles and applications"@en
  • "软 X 射线与极紫外辐射的原理和应用"
  • "Soft X-rays and extreme ultraviolet radiation : principles and applications"
  • "Ruan X she xian yu ji zi wai fu she de yuan li he ying yong"
  • "Soft x-rays and extreme ultraviolet radiation : principles and applications"@en
  • "Soft x-rays and extreme ultraviolet radiation : principles and applications"
  • "Soft x-rays and extreme ultraviolet radiation"

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