"Integrated circuits Very large scale integration." . . "Circuits intégrés à très grande échelle Matériaux." . . "semiconducteur." . . "lithographie." . . . . "Composants électroniques." . . "Materials and process characterization" . "Materials and process characterization"@en . . . "Materials and Process Characterization"@en . . . . . . "Electronic books"@en . . . . . . . . . . . "Materials and Process Characterization."@en . . . . . . . . . . . "VLSI electronics" . . . . "VLSI." . . "Microelectronics Materials." . . "Circuits integrats a molt gran escala" . . "circuit intégré" . . "Semiconductors" . . "TECHNOLOGY & ENGINEERING / Mechanical" . . "matériau électronique." . . "Production engineering." . .