<http://worldcat.org/entity/work/id/365675765> <http://schema.org/name> "Lasers in microlithography : 2-3 March 1987, Santa Clara, California" .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/genre> "Santa Clara (Calif., 1987)" .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/about> <http://id.worldcat.org/fast/992842> .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/about> <http://experiment.worldcat.org/entity/work/data/365675765#Topic/kongress> .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/contributor> <http://worldcat.org/entity/person/id/2629390663> .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/contributor> <http://viaf.org/viaf/167606997> .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/workExample> <http://www.worldcat.org/oclc/16880907> .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/about> <http://experiment.worldcat.org/entity/work/data/365675765#Topic/laser> .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/contributor> <http://worldcat.org/entity/person/id/2640239742> .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/about> <http://experiment.worldcat.org/entity/work/data/365675765#Topic/fotolithografie_halbleitertechnologie> .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/name> "Lasers in microlithography : 2-3 march 1987, Santa Clara" .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/genre> "Conference papers and proceedings" .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/genre> "Conference papers and proceedings"@en .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/about> <http://id.worldcat.org/fast/1019883> .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/about> <http://id.loc.gov/authorities/subjects/sh85084858> .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/name> "Lasers in microlithography 2-3 March 1987, Santa Clara, California"@en .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/genre> "Kongress" .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/contributor> <http://worldcat.org/entity/person/id/2634494136> .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/workExample> <http://www.worldcat.org/oclc/876739285> .
<http://worldcat.org/entity/work/id/365675765> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://schema.org/Book> .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/about> <http://id.loc.gov/authorities/subjects/sh2008106672> .
<http://worldcat.org/entity/work/id/365675765> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://schema.org/CreativeWork> .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/workExample> <http://www.worldcat.org/oclc/573767786> .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/about> <http://id.loc.gov/authorities/subjects/sh85074788> .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/workExample> <http://www.worldcat.org/oclc/635704372> .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/author> <http://worldcat.org/entity/person/id/2634494136> .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/about> <http://id.worldcat.org/fast/992853> .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/about> <http://experiment.worldcat.org/entity/work/data/365675765#Topic/photolithographie_halbleitertechnologie> .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/about> <http://id.loc.gov/authorities/subjects/sh2008107753> .
<http://worldcat.org/entity/work/id/365675765> <http://schema.org/workExample> <http://www.worldcat.org/oclc/839668220> .
<http://experiment.worldcat.org/entity/work/data/365675765.nt> <http://rdfs.org/ns/void#inDataset> <http://purl.oclc.org/dataset/WorldCat/Works> .
<http://experiment.worldcat.org/entity/work/data/365675765.nt> <http://schema.org/about> <http://worldcat.org/entity/work/id/365675765> .
<http://experiment.worldcat.org/entity/work/data/365675765#Topic/laser> <http://schema.org/name> "Laser." .
<http://experiment.worldcat.org/entity/work/data/365675765#Topic/laser> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://schema.org/Topic> .
<http://experiment.worldcat.org/entity/work/data/365675765#Topic/fotolithografie_halbleitertechnologie> <http://schema.org/name> "Fotolithografie (Halbleitertechnologie)" .
<http://experiment.worldcat.org/entity/work/data/365675765#Topic/fotolithografie_halbleitertechnologie> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://schema.org/Topic> .
<http://experiment.worldcat.org/entity/work/data/365675765#Topic/kongress> <http://schema.org/name> "Kongress." .
<http://experiment.worldcat.org/entity/work/data/365675765#Topic/kongress> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://schema.org/Topic> .
<http://experiment.worldcat.org/entity/work/data/365675765#Topic/photolithographie_halbleitertechnologie> <http://schema.org/name> "Photolithographie (Halbleitertechnologie)" .
<http://experiment.worldcat.org/entity/work/data/365675765#Topic/photolithographie_halbleitertechnologie> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://schema.org/Topic> .