Microlithographic techniques in integrated circuit fabrication II 28-30 November 2000, Singapore

http://www.w3.org/1999/02/22-rdf-syntax-ns#type

http://schema.org/CreativeWork
http://schema.org/Book

http://schema.org/about

http://id.worldcat.org/fast/975535
http://experiment.worldcat.org/entity/work/data/367183756#Topic/integrierte_schaltung
http://id.loc.gov/authorities/subjects/sh85067118
http://id.loc.gov/authorities/subjects/sh2008104738
http://experiment.worldcat.org/entity/work/data/367183756#Topic/lithographie_halbleitertechnologie
http://id.worldcat.org/fast/1019883
http://id.loc.gov/authorities/subjects/sh85084858
http://id.worldcat.org/fast/975545
http://id.worldcat.org/fast/975565
http://experiment.worldcat.org/entity/work/data/367183756#Topic/kongress
http://id.worldcat.org/fast/1019884
http://id.loc.gov/authorities/subjects/sh2008110073
http://experiment.worldcat.org/entity/work/data/367183756#Topic/circuits_integres_conception_et_construction_congres
http://experiment.worldcat.org/entity/work/data/367183756#Topic/fabrication_controle_congres
http://id.worldcat.org/fast/1078020
http://id.loc.gov/authorities/subjects/sh85067117
http://experiment.worldcat.org/entity/work/data/367183756#Topic/circuits_integres_inspection_congres
http://experiment.worldcat.org/entity/work/data/367183756#Topic/microlithographie_applications_industrielles_congres
http://id.loc.gov/authorities/subjects/sh85107135

http://schema.org/alternateName

"Microlithographic techniques in integrated circuit fabrication two"
"Microlithographic techniques in integrated circuit fabrication 2"

http://schema.org/contributor

http://id.loc.gov/authorities/names/n85057022
http://experiment.worldcat.org/entity/work/data/367183756#Organization/spie_digital_library
http://worldcat.org/entity/person/id/2640056403
http://viaf.org/viaf/143212124
http://experiment.worldcat.org/entity/work/data/367183756#Organization/society_of_photo_optical_instrumentation_engineers
http://id.loc.gov/authorities/names/n92088778
http://experiment.worldcat.org/entity/work/data/367183756#Meeting/microlithographic_techniques_in_integrated_circuit_fabrication
http://viaf.org/viaf/140405330
http://experiment.worldcat.org/entity/work/data/367183756#Meeting/microlithographic_techniques_in_integrated_circuit_fabrication_singapore_2000
http://worldcat.org/entity/person/id/2630451410
http://experiment.worldcat.org/entity/work/data/367183756#Organization/society_of_photo_optical_instrumentation_engineers_united_states
http://experiment.worldcat.org/entity/work/data/367183756#Organization/nanyang_technological_university_singapore

http://schema.org/genre

"Singapur (2000)"@en
"Conference papers and proceedings"
"Conference papers and proceedings"@en

http://schema.org/name

"Microlithographic Techniques in Integrated Circuit Fabrication II : 28-30 November 2000, Singapore"
"Microlithographic techniques in Integrated circuit fabrication II, 28-30 November 2000, Singapore"
"Microlithographic techniques in integrated circuit fabrication II 28-30 November 2000, Singapore"@en
"Microlithographic techniques in integrated circuit fabrication II 28-30 November 2000, Singapore"
"Microlithographic Techniques in Integrated Circuit Fabrication II 28-30 November 2000, Singapore"
"Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, Singapore"
"Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, Singapore"@en
"Microlithographic techniques in integrated circuit fabrication II"@en

http://schema.org/workExample

http://www.worldcat.org/oclc/849899627
http://www.worldcat.org/oclc/840369866
http://www.worldcat.org/oclc/46338316
http://www.worldcat.org/oclc/53835224
http://www.worldcat.org/oclc/468155492
http://www.worldcat.org/oclc/759719066
http://www.worldcat.org/oclc/841340715
http://www.worldcat.org/oclc/846556530
http://www.worldcat.org/oclc/890209875

Microlithographic Techniques in Integrated Circuit Fabrication.

This is a placeholder reference for a Meeting entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Event
http://www.productontology.org/id/Meeting
schema:name
"Microlithographic Techniques in Integrated Circuit Fabrication."

http://experiment.worldcat.org/entity/work/data/367183756#Meeting/microlithographic_techniques_in_integrated_circuit_fabrication

Microlithographic Techniques in Integrated Circuit Fabrication (Singapore) (2000)

rdf:type
http://schema.org/Event
http://www.productontology.org/id/Meeting
schema:name
"Microlithographic Techniques in Integrated Circuit Fabrication (Singapore) (2000)"

http://experiment.worldcat.org/entity/work/data/367183756#Meeting/microlithographic_techniques_in_integrated_circuit_fabrication_singapore_2000

Nanyang Technological University (Singapore)

This is a placeholder reference for a Organization entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Organization
schema:name
"Nanyang Technological University (Singapore)"

http://experiment.worldcat.org/entity/work/data/367183756#Organization/nanyang_technological_university_singapore

Society of Photo-Optical Instrumentation Engineers.

rdf:type
http://schema.org/Organization
schema:name
"Society of Photo-Optical Instrumentation Engineers."
"Society of Photo-optical Instrumentation Engineers."
"Society of Photo-optical Instrumentation Engineers"

http://experiment.worldcat.org/entity/work/data/367183756#Organization/society_of_photo_optical_instrumentation_engineers

Society of Photo-optical Instrumentation Engineers (United States)

rdf:type
http://schema.org/Organization
schema:name
"Society of Photo-optical Instrumentation Engineers (United States)"

http://experiment.worldcat.org/entity/work/data/367183756#Organization/society_of_photo_optical_instrumentation_engineers_united_states

SPIE Digital Library.

rdf:type
http://schema.org/Organization
schema:name
"SPIE Digital Library."

http://experiment.worldcat.org/entity/work/data/367183756#Organization/spie_digital_library

Circuits intégrés Conception et construction Congrès.

This is a placeholder reference for a Topic entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Topic
schema:name
"Circuits intégrés Conception et construction Congrès."

http://experiment.worldcat.org/entity/work/data/367183756#Topic/circuits_integres_conception_et_construction_congres

Circuits intégrés Inspection Congrès.

rdf:type
http://schema.org/Topic
schema:name
"Circuits intégrés Inspection Congrès."

http://experiment.worldcat.org/entity/work/data/367183756#Topic/circuits_integres_inspection_congres

Fabrication Contrôle Congrès.

rdf:type
http://schema.org/Topic
schema:name
"Fabrication Contrôle Congrès."

http://experiment.worldcat.org/entity/work/data/367183756#Topic/fabrication_controle_congres

Integrierte Schaltung.

rdf:type
http://schema.org/Topic
schema:name
"Integrierte Schaltung."

http://experiment.worldcat.org/entity/work/data/367183756#Topic/integrierte_schaltung

Kongress.

rdf:type
http://schema.org/Topic
schema:name
"Kongress."

http://experiment.worldcat.org/entity/work/data/367183756#Topic/kongress

Lithographie (Halbleitertechnologie)

rdf:type
http://schema.org/Topic
schema:name
"Lithographie (Halbleitertechnologie)"

http://experiment.worldcat.org/entity/work/data/367183756#Topic/lithographie_halbleitertechnologie

Microlithographie Applications industrielles Congrès.

rdf:type
http://schema.org/Topic
schema:name
"Microlithographie Applications industrielles Congrès."