"Society of Photo-optical Instrumentation Engineers (United States)" . . "Microsystèmes électromécaniques Congrès." . . "Conference (2004.11.10-12 Beijing)" . . . "SPIE Digital Library." . . "Dispositifs optoélectroniques Congrès." . . . . "Society of Photo-optical Instrumentation Engineers." . . "Society of Photo-optical Instrumentation Engineers" . "Guo jia zi ran ke xue ji jin wei yuan hui (Chine)" . . . . . . . "MOEMS technologies and applications"@en . . "MOEMS technologies and applications" . . "MEMS/MOEMS technologies and applications II : 10-12 November, 2004, Beijing, China"@en . . . "MEMS/MOEMS technologies and applications II : 10-12 November 2004, Beijing, China" . . . . . . . . "MEMS/MOEMS technologies and applications two"@en . "MEMS/MOEMS technologies and applications two" . "MEMS/MOEMS technologies and applications 2"@en . "MEMS/MOEMS technologies and applications 2" . . . . . "Conference papers and proceedings"@en . "Conference papers and proceedings" . . . . . . . "MEMS/MOEMS technologies and applications II : 10 - 12 November 2004, Beijing, China" . "MEMS/MOEMS technologies and applications II 10-12 November 2004, Beijing, China" . "MEMS/MOEMS technologies and applications II 10-12 November 2004, Beijing, China"@en . . . . . .