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http://worldcat.org/entity/work/id/38326292
Submicron- and nanometer-structures technology
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http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://schema.org/CreativeWork
about
http://schema.org/about
http://id.loc.gov/authorities/subjects/sh85084931
http://id.loc.gov/authorities/subjects/sh85084861
http://id.worldcat.org/fast/1019892
http://id.worldcat.org/fast/1020118
contributor
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http://viaf.org/viaf/130167767
http://id.loc.gov/authorities/names/n78087979
creator
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http://worldcat.org/entity/person/id/2654599794
name
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"
Submicron- and nanometer-structures technology
"
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workExample
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http://www.worldcat.org/oclc/33388898
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