. . . . "Conference papers and proceedings" . . . "Integrated circuit metrology II May 3-4, 1984, Arlington, Virginia" . . . "Integrated Circuit Metrology II : May 3-4, 1984, Arlington, Virginia" . . . . . . "Electronic books" . . . . "Integrated circuit metrology II : May 3-4, 1984, Arlington, Virginia" . "Integrated Circuit Metrology (2 1984.05.03-04 Arlington, Va.)" . . .