Linked Data Explorer

Turtle N-Triple JSON-LD RDF/XML HTML Contact Us Home

http://worldcat.org/entity/work/id/40038531

Xenon difluoride etching of silicon for MEMS

Open All Close All

type

http://www.w3.org/1999/02/22-rdf-syntax-ns#type

creator

http://schema.org/creator

http://worldcat.org/entity/person/id/2717543709

name

http://schema.org/name

"Xenon difluoride etching of silicon for MEMS"@en

workExample

http://schema.org/workExample

http://www.worldcat.org/oclc/34531873