<http://experiment.worldcat.org/entity/work/data/40038531.nt> <http://rdfs.org/ns/void#inDataset> <http://purl.oclc.org/dataset/WorldCat/Works> .
<http://experiment.worldcat.org/entity/work/data/40038531.nt> <http://schema.org/about> <http://worldcat.org/entity/work/id/40038531> .
<http://worldcat.org/entity/work/id/40038531> <http://schema.org/creator> <http://worldcat.org/entity/person/id/2717543709> .
<http://worldcat.org/entity/work/id/40038531> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://schema.org/CreativeWork> .
<http://worldcat.org/entity/work/id/40038531> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://www.productontology.org/id/Thesis> .
<http://worldcat.org/entity/work/id/40038531> <http://schema.org/workExample> <http://www.worldcat.org/oclc/34531873> .
<http://worldcat.org/entity/work/id/40038531> <http://schema.org/name> "Xenon difluoride etching of silicon for MEMS"@en .