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http://worldcat.org/entity/work/id/438181

The physics of micro/nano-fabrication

In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.

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  • "In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references."@en

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  • "Electronic books"@en

name

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  • "The Physics of Micro/Nano-Fabrication"
  • "The physics of micro/nano-fabrication"@en
  • "The physics of micro/nano-fabrication"
  • "The physics of microfabrication"@en
  • "The physics of microfabrication"
  • "The physics of micro-nano-fabrication"
  • "The Physics of Micro/Nano-fabrication"@en
  • "Fizičeskie osnovy mikrotehnologii"
  • "Fizičeskie osnovy mikrotechnologii"
  • "The Physics of Microfabrication"
  • "The Physics of Microfabrication"@en

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