Microlithography process technology for IC fabrication

http://www.w3.org/1999/02/22-rdf-syntax-ns#type

http://schema.org/Book
http://schema.org/CreativeWork

http://schema.org/about

http://id.worldcat.org/fast/1062099
http://experiment.worldcat.org/entity/work/data/5017200#Topic/technologie
http://experiment.worldcat.org/entity/work/data/5017200#Topic/traitement
http://experiment.worldcat.org/entity/work/data/5017200#Topic/microlitografia
http://experiment.worldcat.org/entity/work/data/5017200#Topic/semi_conducteurs
http://id.loc.gov/authorities/subjects/sh2008104742
http://experiment.worldcat.org/entity/work/data/5017200#Topic/circuits_integrats_vlsi_disseny_i_construccio
http://id.loc.gov/authorities/subjects/sh85101409
http://id.worldcat.org/fast/1019883
http://experiment.worldcat.org/entity/work/data/5017200#Topic/fotolithografie_halbleitertechnologie
http://experiment.worldcat.org/entity/work/data/5017200#Topic/photolithographie_halbleitertechnologie
http://id.worldcat.org/fast/975610
http://experiment.worldcat.org/entity/work/data/5017200#Topic/circuits_integres
http://experiment.worldcat.org/entity/work/data/5017200#Topic/circuits_integres_a_grande_echelle
http://experiment.worldcat.org/entity/work/data/5017200#Topic/mikrolithographie
http://experiment.worldcat.org/entity/work/data/5017200#Topic/vlsi
http://experiment.worldcat.org/entity/work/data/5017200#Topic/detectors_optics
http://id.loc.gov/authorities/subjects/sh85084858
http://experiment.worldcat.org/entity/work/data/5017200#Topic/integrierte_schaltung_herstellung
http://experiment.worldcat.org/entity/work/data/5017200#Topic/technik
http://experiment.worldcat.org/entity/work/data/5017200#Topic/lithographie_halbleitertechnologie
http://experiment.worldcat.org/entity/work/data/5017200#Topic/circuits_integrals_disseny_i_construccio
http://experiment.worldcat.org/entity/work/data/5017200#Topic/circuits_integres_a_tres_grande_echelle
http://experiment.worldcat.org/entity/work/data/5017200#Topic/integrierte_schaltung
http://experiment.worldcat.org/entity/work/data/5017200#Topic/microlithographie
http://experiment.worldcat.org/entity/work/data/5017200#Topic/lithografie_halbleitertechnologie
http://experiment.worldcat.org/entity/work/data/5017200#Topic/integralt_aramkorok_mikrolitografia_fenyellenallas_integralt_aramkorok

http://schema.org/author

http://worldcat.org/entity/person/id/2630355281

http://schema.org/creator

http://worldcat.org/entity/person/id/2630355281

http://schema.org/name

"Microlithography process technology for IC fabrication"@en
"Microlithography : process technology for IC fabrication"
"Microlithography : process technology for IC fabriaction"

http://schema.org/workExample

http://www.worldcat.org/oclc/455868584
http://www.worldcat.org/oclc/908924830
http://www.worldcat.org/oclc/569568674
http://www.worldcat.org/oclc/611786517
http://www.worldcat.org/oclc/489866025
http://www.worldcat.org/oclc/803257871
http://www.worldcat.org/oclc/12418734

Circuits integrals Disseny i construcció.

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rdf:type
http://schema.org/Topic
schema:name
"Circuits integrals Disseny i construcció."