Linked Data Explorerhttp://worldcat.org/entity/work/id/510751913
Advanced microlithography technologies 8-10 November, 2004, Beijing, China
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http://schema.org/about
- http://id.loc.gov/authorities/subjects/sh2008104740
- http://experiment.worldcat.org/entity/work/data/510751913#Topic/lithographie_par_rayons_x_congres
- http://id.worldcat.org/fast/1181834
- http://id.worldcat.org/fast/975575
- http://id.loc.gov/authorities/subjects/sh85067122
- http://id.loc.gov/authorities/subjects/sh85067117
- http://id.loc.gov/authorities/subjects/sh2008114009
- http://id.loc.gov/authorities/subjects/sh85148736
- http://id.worldcat.org/fast/975535
- http://id.worldcat.org/fast/1008139
- http://id.loc.gov/authorities/subjects/sh85084858
- http://id.loc.gov/authorities/subjects/sh2008107753
- http://id.loc.gov/authorities/subjects/sh2008107338
- http://experiment.worldcat.org/entity/work/data/510751913#Topic/fabrication_congres
- http://id.loc.gov/authorities/subjects/sh85080664
- http://experiment.worldcat.org/entity/work/data/510751913#Topic/microlithographie_congres
- http://experiment.worldcat.org/entity/work/data/510751913#Topic/circuits_integres_masques_congres
- http://id.worldcat.org/fast/1019883
http://schema.org/alternateName
- "Microlithography technologies"@en
- "Microlithography technologies"
http://schema.org/contributor
- http://experiment.worldcat.org/entity/work/data/510751913#Organization/society_of_photo_optical_instrumentation_engineers
- http://experiment.worldcat.org/entity/work/data/510751913#Organization/spie_digital_library
- http://id.loc.gov/authorities/names/n2002022021
- http://experiment.worldcat.org/entity/work/data/510751913#Meeting/conference_2004_11_08_10_beijing
- http://experiment.worldcat.org/entity/work/data/510751913#Organization/guo_jia_zi_ran_ke_xue_ji_jin_wei_yuan_hui_chine
- http://viaf.org/viaf/154797876
- http://id.loc.gov/authorities/names/no92021570
- http://experiment.worldcat.org/entity/work/data/510751913#Organization/society_of_photo_optical_instrumentation_engineers_united_states
- http://worldcat.org/entity/person/id/2636599862
- http://experiment.worldcat.org/entity/work/data/510751913#Organization/cos_chinese_optical_society
- http://id.loc.gov/authorities/names/n82154464
- http://viaf.org/viaf/147086048
- http://worldcat.org/entity/person/id/2638218111
- http://worldcat.org/entity/person/id/2642096850
- http://viaf.org/viaf/126106893
http://schema.org/genre
- "Conference papers and proceedings"@en
- "Conference papers and proceedings"
http://schema.org/name
- "Advanced microlithography technologies 8-10 November, 2004, Beijing, China"@en
- "Advanced microlithography technologies : 8-10 November 2004, Beijing, China"
- "Advanced microlithography technologies 8-10 November 2004, Beijing, China"@en
- "Advanced microlithography technologies 8-10 November 2004, Beijing, China"
- "Advanced microlithography technologies"@en
- "Advanced microlithography technologies : 8-10 November, 2004, Beijing, China"@en
- "Advanced microlithography technologies : 8 - 10 November 2004, Beijing, China"
http://schema.org/workExample
- http://www.worldcat.org/oclc/254777954
- http://www.worldcat.org/oclc/58793964
- http://www.worldcat.org/oclc/840392724
- http://www.worldcat.org/oclc/841358205
- http://www.worldcat.org/oclc/58800782
- http://www.worldcat.org/oclc/607678301
- http://www.worldcat.org/oclc/850547990
- http://www.worldcat.org/oclc/468144958
- http://www.worldcat.org/oclc/794099339
- http://www.worldcat.org/oclc/759722295