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http://worldcat.org/entity/work/id/5462667

Micromachining and micropackaging of transducers

http://www.w3.org/1999/02/22-rdf-syntax-ns#type

http://schema.org/CreativeWork

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http://id.worldcat.org/fast/1154578
http://id.loc.gov/authorities/subjects/sh2008107749
http://experiment.worldcat.org/entity/work/data/5462667#Topic/technik
http://id.worldcat.org/fast/1019888
http://id.loc.gov/authorities/subjects/sh85136892
http://experiment.worldcat.org/entity/work/data/5462667#Topic/sensor
http://experiment.worldcat.org/entity/work/data/5462667#Topic/transducers_congresses_design_and_construction
http://experiment.worldcat.org/entity/work/data/5462667#Topic/micromachining_congresses
http://experiment.worldcat.org/entity/work/data/5462667#Topic/mikroelektronik

http://schema.org/contributor

http://experiment.worldcat.org/entity/work/data/5462667#Meeting/workshop_on_micromachining_and_micropackaging_of_transducers_1984_case_western_reserve_university
http://experiment.worldcat.org/entity/work/data/5462667#Organization/case_western_reserve_university_case_institute_of_technology_electronics_design_center
http://experiment.worldcat.org/entity/work/data/5462667#Meeting/workshop_on_micromachining_and_micropackaging_of_transducers_1984_cleveland_ohio
http://worldcat.org/entity/person/id/2661537255
http://worldcat.org/entity/person/id/2630807915
http://experiment.worldcat.org/entity/work/data/5462667#Organization/case_western_reserve_university_semiconductor_chemical_transducer_resource
http://worldcat.org/entity/person/id/2741747113

http://schema.org/name

"Micromachining and micropackaging of transducers"@en
"Micromachining and micropackaging of transducers"
"Micromachining and micropackaging of transducers : (based on a 3-day workshop; Cleveland - O., November 7-9, 1984)"
"Micromachining and micropackaging of transducers : Papers from the workshop, Case Western Reserve University, Cleveland,Ohio 1984"

http://schema.org/workExample

http://www.worldcat.org/oclc/636746638
http://www.worldcat.org/oclc/246803000
http://www.worldcat.org/oclc/905461994
http://www.worldcat.org/oclc/12669388
http://www.worldcat.org/oclc/264226194
http://www.worldcat.org/oclc/471751748
http://www.worldcat.org/oclc/631727277

Workshop on Micromachining and Micropackaging of Transducers (1984 : Case Western Reserve University?)

This is a placeholder reference for a Meeting entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
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"Workshop on Micromachining and Micropackaging of Transducers (1984 : Case Western Reserve University?)"

http://experiment.worldcat.org/entity/work/data/5462667#Meeting/workshop_on_micromachining_and_micropackaging_of_transducers_1984_case_western_reserve_university

Workshop on Micromachining and Micropackaging of Transducers (1984 ; Cleveland, Ohio)

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http://schema.org/Event
http://www.productontology.org/id/Meeting
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"Workshop on Micromachining and Micropackaging of Transducers (1984 ; Cleveland, Ohio)"

http://experiment.worldcat.org/entity/work/data/5462667#Meeting/workshop_on_micromachining_and_micropackaging_of_transducers_1984_cleveland_ohio

Case Western Reserve University. Case Institute of Technology, Electronics Design Center

This is a placeholder reference for a Organization entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Organization
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"Case Western Reserve University. Case Institute of Technology, Electronics Design Center"

http://experiment.worldcat.org/entity/work/data/5462667#Organization/case_western_reserve_university_case_institute_of_technology_electronics_design_center

Case Western Reserve University. Semiconductor Chemical Transducer Resource

rdf:type
http://schema.org/Organization
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"Case Western Reserve University. Semiconductor Chemical Transducer Resource"

http://experiment.worldcat.org/entity/work/data/5462667#Organization/case_western_reserve_university_semiconductor_chemical_transducer_resource

Micromachining Congresses.

This is a placeholder reference for a Topic entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
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"Micromachining Congresses."

http://experiment.worldcat.org/entity/work/data/5462667#Topic/micromachining_congresses

Mikroelektronik.

rdf:type
http://schema.org/Topic
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"Mikroelektronik."

http://experiment.worldcat.org/entity/work/data/5462667#Topic/mikroelektronik

Sensor.

rdf:type
http://schema.org/Topic
schema:name
"Sensor."

http://experiment.worldcat.org/entity/work/data/5462667#Topic/sensor

Technik.

rdf:type
http://schema.org/Topic
schema:name
"Technik."

http://experiment.worldcat.org/entity/work/data/5462667#Topic/technik

Transducers Congresses Design and construction.

rdf:type
http://schema.org/Topic
schema:name
"Transducers Congresses Design and construction."

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Micromachining and micropackaging of transducers

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name

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