Linked Data Explorerhttp://worldcat.org/entity/work/id/54981762
Tungsten and other refractory metals for VLSI applications II : proceedings of the 1986 workshop held November 12-14, 1986, Palo Alto, California, U.S.A
Open All Close All
http://schema.org/about
- http://experiment.worldcat.org/entity/work/data/54981762#Topic/vlsi
- http://experiment.worldcat.org/entity/work/data/54981762#Topic/ionenstrahl
- http://id.worldcat.org/fast/1158887
- http://id.loc.gov/authorities/subjects/sh85138607
- http://id.loc.gov/authorities/subjects/sh85067125
- http://experiment.worldcat.org/entity/work/data/54981762#Topic/nichtleiter
- http://id.worldcat.org/fast/953953
- http://experiment.worldcat.org/entity/work/data/54981762#Topic/dunne_schicht
- http://experiment.worldcat.org/entity/work/data/54981762#Topic/cvd_verfahren
- http://experiment.worldcat.org/entity/work/data/54981762#Topic/konferenz
- http://experiment.worldcat.org/entity/work/data/54981762#Topic/sputtern
- http://id.loc.gov/authorities/subjects/sh2008105545
- http://id.worldcat.org/fast/975613
- http://experiment.worldcat.org/entity/work/data/54981762#Topic/atzen
http://schema.org/contributor
- http://experiment.worldcat.org/entity/work/data/54981762#Meeting/workshop_on_tungsten_and_other_refractory_metals_for_vlsi_applications_3rd_1986_palo_alto_calif
- http://worldcat.org/entity/person/id/2635400626
- http://viaf.org/viaf/132567895
- http://experiment.worldcat.org/entity/work/data/54981762#Meeting/workshop_on_tungsten_and_other_refractory_metals_for_vlsi_application_3_1986_palo_alto_calif
- http://worldcat.org/entity/person/id/2637065681
- http://id.loc.gov/authorities/names/n83302700
http://schema.org/genre
- "Conference papers and proceedings"
http://schema.org/name
- "Tungsten and other refractory metals for VLSI applications II : proceedings of the 1986 workshop held November 12-14, 1986, Palo Alto, California, U.S.A"