Database needs for modeling and simulation of plasma processing

http://www.w3.org/1999/02/22-rdf-syntax-ns#type

http://schema.org/CreativeWork
http://schema.org/Book

http://schema.org/about

http://experiment.worldcat.org/entity/work/data/56139806#Topic/plasmas_technique_des_simulation_par_ordinateur_congres
http://experiment.worldcat.org/entity/work/data/56139806#Topic/plasmas_technique_des_bases_de_donnees
http://experiment.worldcat.org/entity/work/data/56139806#Topic/semiconductors_design_and_construction_congresses
http://experiment.worldcat.org/entity/work/data/56139806#Topic/plasma_engineering_databases_congresses
http://experiment.worldcat.org/entity/work/data/56139806#Topic/plasmas_technique_des_bases_de_donnees_congres
http://experiment.worldcat.org/entity/work/data/56139806#Topic/surface_chemistry
http://id.loc.gov/authorities/subjects/sh85103069
http://experiment.worldcat.org/entity/work/data/56139806#Topic/science_physics_electricity
http://experiment.worldcat.org/entity/work/data/56139806#Topic/plasma_engineering_computer_simulation
http://experiment.worldcat.org/entity/work/data/56139806#Topic/plasma_devices
http://experiment.worldcat.org/entity/work/data/56139806#Topic/semiconductor_devices
http://experiment.worldcat.org/entity/work/data/56139806#Topic/plasma_engineering_computer_simulation_congresses
http://experiment.worldcat.org/entity/work/data/56139806#Topic/semiconducteurs_conception_et_construction
http://experiment.worldcat.org/entity/work/data/56139806#Topic/plasma_engineering_databases
http://experiment.worldcat.org/entity/work/data/56139806#Topic/integrated_circuits
http://experiment.worldcat.org/entity/work/data/56139806#Topic/masks
http://experiment.worldcat.org/entity/work/data/56139806#Topic/computers
http://experiment.worldcat.org/entity/work/data/56139806#Topic/semiconductors_design_and_construction
http://experiment.worldcat.org/entity/work/data/56139806#Topic/data_bases
http://id.loc.gov/authorities/subjects/sh2008111516
http://experiment.worldcat.org/entity/work/data/56139806#Topic/mfg_&_industrial_eng_&_control_of_product_sys
http://experiment.worldcat.org/entity/work/data/56139806#Topic/plasmas_technique_des_simulation_par_ordinateur
http://experiment.worldcat.org/entity/work/data/56139806#Topic/etching
http://experiment.worldcat.org/entity/work/data/56139806#Topic/databases_general
http://id.worldcat.org/fast/1066323
http://experiment.worldcat.org/entity/work/data/56139806#Topic/production_engineering
http://id.worldcat.org/fast/1112213
http://experiment.worldcat.org/entity/work/data/56139806#Topic/semiconducteurs_conception_et_construction_congres
http://experiment.worldcat.org/entity/work/data/56139806#Topic/manufacturing

http://schema.org/contributor

http://id.loc.gov/authorities/names/n97036929
http://experiment.worldcat.org/entity/work/data/56139806#Organization/national_research_council_washington_dc
http://viaf.org/viaf/132699378

http://schema.org/genre

"Conference papers and proceedings"
"Conference papers and proceedings"@en
"Electronic books"@en
"Electronic books"
"Livres électroniques"

http://schema.org/name

"Database needs for modeling and simulation of plasma processing"
"Database needs for modeling and simulation of plasma processing"@en
"Database Needs for Modeling and Simulation of Plasma Processing"@en

http://schema.org/workExample

http://www.worldcat.org/oclc/43475625
http://www.worldcat.org/oclc/36176538
http://www.worldcat.org/oclc/896936757
http://www.worldcat.org/oclc/227990606
http://www.worldcat.org/oclc/839964416
http://www.worldcat.org/oclc/704504490
http://www.worldcat.org/oclc/754043354

NATIONAL RESEARCH COUNCIL WASHINGTON DC.

This is a placeholder reference for a Organization entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Organization
schema:name
"NATIONAL RESEARCH COUNCIL WASHINGTON DC."

http://experiment.worldcat.org/entity/work/data/56139806#Organization/national_research_council_washington_dc

COMPUTERS

This is a placeholder reference for a Topic entity, related to a WorldCat Entity. Over time, these references will be replaced with persistent URIs to VIAF, FAST, WorldCat, and other Linked Data resources.

rdf:type
http://schema.org/Topic
schema:name
"COMPUTERS"