"Manufacturing." . . "Plasmas, Technique des Simulation par ordinateur Congrès." . . "COMPUTERS" . . "Mfg & Industrial Eng & Control of Product Sys." . . "Production engineering." . . "Plasma engineering Computer simulation Congresses." . . "Plasmas, Technique des Simulation par ordinateur." . . "Integrated circuits." . . "SCIENCE Physics Electricity." . . "NATIONAL RESEARCH COUNCIL WASHINGTON DC." . . "Semiconductor devices." . . . . "Masks." . . "Databases / General" . . "Etching." . . "Semiconductors Design and construction." . . "Surface chemistry." . . "Data bases." . . "Semiconducteurs Conception et construction Congrès." . . "Plasma engineering Databases." . . "Plasma devices." . . "Semiconducteurs Conception et construction." . . "Plasmas, Technique des Bases de donnees." . . "Semiconductors Design and construction Congresses." . . "Plasmas, Technique des Bases de données Congrès." . . "Plasma engineering Databases Congresses." . . "Plasma engineering Computer simulation." . . . . . . "Conference papers and proceedings" . "Conference papers and proceedings"@en . . . "Electronic books" . "Electronic books"@en . . . . . . . . . "Database needs for modeling and simulation of plasma processing" . "Database needs for modeling and simulation of plasma processing"@en . . . . . . . . . . . . . . . . . . . "Database Needs for Modeling and Simulation of Plasma Processing"@en . . . . . "Livres électroniques" . . . . . .