Linked Data Explorerhttp://worldcat.org/entity/work/id/5869626
Micro electro mechanical system design
Writing for new entrants into the field, Allen (Sandia National Laboratories) provides an overview of the process of microelectromechanical system (MEMS) design. He covers the full spectrum of interrelated issues involved, including fabrication technologies, relevant physics for a device at the micron scale, computer-aided design issues in the impl.
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http://schema.org/about
- http://experiment.worldcat.org/entity/work/data/5869626#Topic/technology_&_engineering_mechanical
- http://experiment.worldcat.org/entity/work/data/5869626#Topic/sistemes_microelectromecanics_disseny_i_construccio
- http://experiment.worldcat.org/entity/work/data/5869626#Topic/toegepaste_fysische_ingenieurstechnieken
- http://experiment.worldcat.org/entity/work/data/5869626#Topic/electronic_books
- http://id.loc.gov/authorities/subjects/sh97007351
- http://id.worldcat.org/fast/1019747
- http://experiment.worldcat.org/entity/work/data/5869626#Topic/elektrotechniek
- http://experiment.worldcat.org/entity/work/data/5869626#Topic/mems
- http://experiment.worldcat.org/entity/work/data/5869626#Topic/microsystemes_electromecaniques
- http://id.worldcat.org/fast/910453
- http://experiment.worldcat.org/entity/work/data/5869626#Topic/microsystemes_electromecaniques_conception_et_construction
- http://id.loc.gov/authorities/subjects/sh85043209
- http://experiment.worldcat.org/entity/work/data/5869626#Topic/diseno_tecnico_libros_electronicos
- http://experiment.worldcat.org/entity/work/data/5869626#Topic/micromachines_conception_et_construction
- http://experiment.worldcat.org/entity/work/data/5869626#Topic/konstruieren
- http://experiment.worldcat.org/entity/work/data/5869626#Topic/enginyeria_disseny
- http://experiment.worldcat.org/entity/work/data/5869626#Topic/conception_technique
- http://experiment.worldcat.org/entity/work/data/5869626#Topic/elektromechanica
- http://experiment.worldcat.org/entity/work/data/5869626#Topic/micromechanica
- http://experiment.worldcat.org/entity/work/data/5869626#Topic/microelectromechanical_systems_design_and_construction
- http://experiment.worldcat.org/entity/work/data/5869626#Topic/sistemas_microelectromecanicos_libros_electronicos
- http://experiment.worldcat.org/entity/work/data/5869626#Topic/systemes_microelectromecaniques_conception_et_construction
http://schema.org/description
- "Writing for new entrants into the field, Allen (Sandia National Laboratories) provides an overview of the process of microelectromechanical system (MEMS) design. He covers the full spectrum of interrelated issues involved, including fabrication technologies, relevant physics for a device at the micron scale, computer-aided design issues in the impl."@en
http://schema.org/workExample
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