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<http://experiment.worldcat.org/entity/work/data/774337296#Topic/zeitschrift> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://schema.org/Topic> .
<http://experiment.worldcat.org/entity/work/data/774337296#Organization/american_vacuum_society> <http://schema.org/name> "American Vacuum Society." .
<http://experiment.worldcat.org/entity/work/data/774337296#Organization/american_vacuum_society> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://schema.org/Organization> .
<http://experiment.worldcat.org/entity/work/data/774337296.nt> <http://rdfs.org/ns/void#inDataset> <http://purl.oclc.org/dataset/WorldCat/Works> .
<http://experiment.worldcat.org/entity/work/data/774337296.nt> <http://schema.org/about> <http://worldcat.org/entity/work/id/774337296> .
<http://experiment.worldcat.org/entity/work/data/774337296#Topic/vakuumtechnik> <http://schema.org/name> "Vakuumtechnik." .
<http://experiment.worldcat.org/entity/work/data/774337296#Topic/vakuumtechnik> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://schema.org/Topic> .
<http://worldcat.org/entity/work/id/774337296> <http://schema.org/workExample> <http://www.worldcat.org/oclc/630221344> .
<http://worldcat.org/entity/work/id/774337296> <http://schema.org/name> "Journal of vacuum science & technology / B" .
<http://worldcat.org/entity/work/id/774337296> <http://schema.org/name> "Journal of vacuum science & technology : JVST ; the official journal of the AVS / B : an international journal devoted to microelectronics and nanometer structures ; processing, measurement and phenomena" .
<http://worldcat.org/entity/work/id/774337296> <http://schema.org/alternateName> "Microelectronics and nanometer structures" .
<http://worldcat.org/entity/work/id/774337296> <http://schema.org/alternateName> "Journal of vacuum science & technology / B" .
<http://worldcat.org/entity/work/id/774337296> <http://schema.org/about> <http://experiment.worldcat.org/entity/work/data/774337296#Topic/zeitschrift> .
<http://worldcat.org/entity/work/id/774337296> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://www.productontology.org/id/Periodical_literature> .
<http://worldcat.org/entity/work/id/774337296> <http://schema.org/name> "Journal of vacuum science & technology. B : an international journal devoted to microelectronics and nanometer structures ; processing, measurement and phenomena : JVST ; the official journal of the AVS" .
<http://worldcat.org/entity/work/id/774337296> <http://schema.org/contributor> <http://experiment.worldcat.org/entity/work/data/774337296#Organization/american_vacuum_society> .
<http://worldcat.org/entity/work/id/774337296> <http://www.w3.org/1999/02/22-rdf-syntax-ns#type> <http://schema.org/CreativeWork> .
<http://worldcat.org/entity/work/id/774337296> <http://schema.org/about> <http://experiment.worldcat.org/entity/work/data/774337296#Topic/vakuumtechnik> .
<http://worldcat.org/entity/work/id/774337296> <http://schema.org/alternateName> "Journal of vacuum science and technology" .
<http://worldcat.org/entity/work/id/774337296> <http://schema.org/workExample> <http://www.worldcat.org/oclc/263603465> .
<http://worldcat.org/entity/work/id/774337296> <http://schema.org/alternateName> "Microelectronics processing and phenomena" .